JPH0392043U - - Google Patents
Info
- Publication number
- JPH0392043U JPH0392043U JP62790U JP62790U JPH0392043U JP H0392043 U JPH0392043 U JP H0392043U JP 62790 U JP62790 U JP 62790U JP 62790 U JP62790 U JP 62790U JP H0392043 U JPH0392043 U JP H0392043U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- covering
- wafer
- skeleton
- hold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000012779 reinforcing material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62790U JPH0392043U (ko) | 1990-01-08 | 1990-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62790U JPH0392043U (ko) | 1990-01-08 | 1990-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392043U true JPH0392043U (ko) | 1991-09-19 |
Family
ID=31504569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62790U Pending JPH0392043U (ko) | 1990-01-08 | 1990-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392043U (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59198731A (ja) * | 1983-04-26 | 1984-11-10 | Toshiba Corp | 半導体ウエ−ハの収納キヤリア |
-
1990
- 1990-01-08 JP JP62790U patent/JPH0392043U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59198731A (ja) * | 1983-04-26 | 1984-11-10 | Toshiba Corp | 半導体ウエ−ハの収納キヤリア |