JPH03130536U - - Google Patents
Info
- Publication number
- JPH03130536U JPH03130536U JP4004090U JP4004090U JPH03130536U JP H03130536 U JPH03130536 U JP H03130536U JP 4004090 U JP4004090 U JP 4004090U JP 4004090 U JP4004090 U JP 4004090U JP H03130536 U JPH03130536 U JP H03130536U
- Authority
- JP
- Japan
- Prior art keywords
- pressure chamber
- pressure
- communication hole
- strain gauge
- semiconductor strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の実施例の圧力センサの断面図
である。 ４……ダイヤフラム、８ａ，ｂ……半導体歪ゲ
ージ、１６……継手部材、２４……ケーシング、
２６……プリント基板、３０……圧力室、３２…
…連通孔、３４……薄膜ゴム。
である。 ４……ダイヤフラム、８ａ，ｂ……半導体歪ゲ
ージ、１６……継手部材、２４……ケーシング、
２６……プリント基板、３０……圧力室、３２…
…連通孔、３４……薄膜ゴム。
Claims (1)
- 起歪部を有するダイヤフラムの受圧面の裏側に
半導体歪ゲージを形成し、その半導体歪ゲージを
形成した側の上部空間に圧力室を形成し、その圧
力室と外部大気空間を連通する連通孔を設け、そ
の連通孔に薄膜で形成された弾性部材を張付けて
前記圧力室を密閉状態にしたことを特徴とする圧
力センサ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4004090U JPH03130536U (ja) | 1990-04-13 | 1990-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4004090U JPH03130536U (ja) | 1990-04-13 | 1990-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03130536U true JPH03130536U (ja) | 1991-12-27 |
Family
ID=31549484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4004090U Pending JPH03130536U (ja) | 1990-04-13 | 1990-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03130536U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009056580A (ja) * | 2007-08-31 | 2009-03-19 | Proxene Tools Co Ltd | スパナ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6156548B2 (ja) * | 1980-07-25 | 1986-12-03 | Fujitsu Ltd |
-
1990
- 1990-04-13 JP JP4004090U patent/JPH03130536U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6156548B2 (ja) * | 1980-07-25 | 1986-12-03 | Fujitsu Ltd |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009056580A (ja) * | 2007-08-31 | 2009-03-19 | Proxene Tools Co Ltd | スパナ |