JPS6228153U - - Google Patents

Info

Publication number
JPS6228153U
JPS6228153U JP12066585U JP12066585U JPS6228153U JP S6228153 U JPS6228153 U JP S6228153U JP 12066585 U JP12066585 U JP 12066585U JP 12066585 U JP12066585 U JP 12066585U JP S6228153 U JPS6228153 U JP S6228153U
Authority
JP
Japan
Prior art keywords
pellet
sensor
diaphragm
moisture
serves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12066585U
Other languages
English (en)
Other versions
JPH0618278Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985120665U priority Critical patent/JPH0618278Y2/ja
Publication of JPS6228153U publication Critical patent/JPS6228153U/ja
Application granted granted Critical
Publication of JPH0618278Y2 publication Critical patent/JPH0618278Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Description

【図面の簡単な説明】
第1図は本考案実施例を示す断面図、第2図A
は既に提案された例を示す断面図、第2図Bは同
要部平面図である。 1……圧力センサペレツト、3……ダイアフラ
ム、9……感湿伸縮体。

Claims (1)

    【実用新案登録請求の範囲】
  1. 表面にピエゾ抵抗領域を有するシリコンダイア
    フラム型圧力センサペレツトと、該ペレツトのダ
    イヤフラム裏面に被着され、上記センサへの圧力
    印加体となる感湿伸縮体とを具備する湿度検出装
    置。
JP1985120665U 1985-08-05 1985-08-05 湿度検出装置 Expired - Lifetime JPH0618278Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985120665U JPH0618278Y2 (ja) 1985-08-05 1985-08-05 湿度検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985120665U JPH0618278Y2 (ja) 1985-08-05 1985-08-05 湿度検出装置

Publications (2)

Publication Number Publication Date
JPS6228153U true JPS6228153U (ja) 1987-02-20
JPH0618278Y2 JPH0618278Y2 (ja) 1994-05-11

Family

ID=31009196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985120665U Expired - Lifetime JPH0618278Y2 (ja) 1985-08-05 1985-08-05 湿度検出装置

Country Status (1)

Country Link
JP (1) JPH0618278Y2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02212744A (ja) * 1989-02-13 1990-08-23 Sanyo Electric Co Ltd 半導体湿度センサ
JPH02212745A (ja) * 1989-02-13 1990-08-23 Sanyo Electric Co Ltd 半導体湿度センサ
JP2017181435A (ja) * 2016-03-31 2017-10-05 京セラ株式会社 応力センサ
US10866203B2 (en) 2016-03-31 2020-12-15 Kyocera Corporation Stress sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028784U (ja) * 1973-07-09 1975-04-02
JPS5143980A (ja) * 1974-10-14 1976-04-15 Automobile Antipollution Handotaihizumigeejishikiatsuryokusensa
JPS54158289A (en) * 1978-06-05 1979-12-13 Hitachi Ltd Humidity detector

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028784U (ja) * 1973-07-09 1975-04-02
JPS5143980A (ja) * 1974-10-14 1976-04-15 Automobile Antipollution Handotaihizumigeejishikiatsuryokusensa
JPS54158289A (en) * 1978-06-05 1979-12-13 Hitachi Ltd Humidity detector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02212744A (ja) * 1989-02-13 1990-08-23 Sanyo Electric Co Ltd 半導体湿度センサ
JPH02212745A (ja) * 1989-02-13 1990-08-23 Sanyo Electric Co Ltd 半導体湿度センサ
JP2017181435A (ja) * 2016-03-31 2017-10-05 京セラ株式会社 応力センサ
US10866203B2 (en) 2016-03-31 2020-12-15 Kyocera Corporation Stress sensor

Also Published As

Publication number Publication date
JPH0618278Y2 (ja) 1994-05-11

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