JPH0187230U - - Google Patents

Info

Publication number
JPH0187230U
JPH0187230U JP18271687U JP18271687U JPH0187230U JP H0187230 U JPH0187230 U JP H0187230U JP 18271687 U JP18271687 U JP 18271687U JP 18271687 U JP18271687 U JP 18271687U JP H0187230 U JPH0187230 U JP H0187230U
Authority
JP
Japan
Prior art keywords
diaphragm
pressure
space
detection element
pressure detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18271687U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18271687U priority Critical patent/JPH0187230U/ja
Publication of JPH0187230U publication Critical patent/JPH0187230U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す縦断面図、第
２図は従来例を示す第１図相当図である。 図中、１１は基体、１２は半導体圧力センサ（
圧力検出素子）、１７はダイヤフラム、１８は空
間部、１９はシリコンオイル（圧力伝達媒体）で
ある。

Claims (1)

    【実用新案登録請求の範囲】
  1. 外部圧力に応動して変形するダイヤフラムと、
    このダイヤフラムと共に気密な空間部を形成する
    ように設けられた基体と、前記空間部内に配設さ
    れた圧力検出素子と、前記空間部内に充填され前
    記ダイヤフラムの変位を前記圧力検出素子に伝え
    る圧力伝達媒体とを備えたダイヤフラム式圧力セ
    ンサであつて、前記ダイヤフラムをセラミツクス
    から形成したことを特徴とするダイヤフラム式圧
    力センサ。
JP18271687U 1987-11-30 1987-11-30 Pending JPH0187230U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18271687U JPH0187230U (ja) 1987-11-30 1987-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18271687U JPH0187230U (ja) 1987-11-30 1987-11-30

Publications (1)

Publication Number Publication Date
JPH0187230U true JPH0187230U (ja) 1989-06-08

Family

ID=31474160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18271687U Pending JPH0187230U (ja) 1987-11-30 1987-11-30

Country Status (1)

Country Link
JP (1) JPH0187230U (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5627630A (en) * 1979-08-16 1981-03-18 Matsushita Electric Ind Co Ltd Pressure sensitive element
JPS5797422A (en) * 1980-12-10 1982-06-17 Matsushita Electric Ind Co Ltd Manufacture of electrostatic capacity type pressure sensor
JPS5822933A (ja) * 1981-08-04 1983-02-10 Toshiba Corp 耐圧防爆形絶対圧力変換器
JPS58198739A (ja) * 1982-05-14 1983-11-18 Matsushita Electric Ind Co Ltd 静電容量型圧力センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5627630A (en) * 1979-08-16 1981-03-18 Matsushita Electric Ind Co Ltd Pressure sensitive element
JPS5797422A (en) * 1980-12-10 1982-06-17 Matsushita Electric Ind Co Ltd Manufacture of electrostatic capacity type pressure sensor
JPS5822933A (ja) * 1981-08-04 1983-02-10 Toshiba Corp 耐圧防爆形絶対圧力変換器
JPS58198739A (ja) * 1982-05-14 1983-11-18 Matsushita Electric Ind Co Ltd 静電容量型圧力センサ

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