JPH0312057Y2 - - Google Patents
Info
- Publication number
- JPH0312057Y2 JPH0312057Y2 JP9514885U JP9514885U JPH0312057Y2 JP H0312057 Y2 JPH0312057 Y2 JP H0312057Y2 JP 9514885 U JP9514885 U JP 9514885U JP 9514885 U JP9514885 U JP 9514885U JP H0312057 Y2 JPH0312057 Y2 JP H0312057Y2
- Authority
- JP
- Japan
- Prior art keywords
- body member
- floating body
- attached
- vacuum
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007667 floating Methods 0.000 claims description 32
- 238000005339 levitation Methods 0.000 claims description 15
- 238000004804 winding Methods 0.000 claims description 12
- 239000000696 magnetic material Substances 0.000 claims description 6
- 239000000428 dust Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Linear Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9514885U JPH0312057Y2 (de) | 1985-06-25 | 1985-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9514885U JPH0312057Y2 (de) | 1985-06-25 | 1985-06-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS624882U JPS624882U (de) | 1987-01-13 |
| JPH0312057Y2 true JPH0312057Y2 (de) | 1991-03-22 |
Family
ID=30959363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9514885U Expired JPH0312057Y2 (de) | 1985-06-25 | 1985-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312057Y2 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1020633C2 (nl) * | 2002-05-21 | 2003-11-24 | Otb Group Bv | Samenstel voor het behandelen van substraten. |
| JP6098923B2 (ja) * | 2012-12-27 | 2017-03-22 | シンフォニアテクノロジー株式会社 | 搬送装置 |
-
1985
- 1985-06-25 JP JP9514885U patent/JPH0312057Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS624882U (de) | 1987-01-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR960702412A (ko) | 웨이퍼 이송 장치(wafer transport device) | |
| KR101454302B1 (ko) | 디스플레이 제조설비용 자기부상 이송 시스템 | |
| US8794426B2 (en) | Pallet-based position adjustment system and method | |
| KR20080014578A (ko) | 기판 이송 장치 | |
| KR20080045068A (ko) | 레일 운송 장치 | |
| KR20110049936A (ko) | 자기부상 및 자기베어링을 이용한 직선이송장치 | |
| JPH0312057Y2 (de) | ||
| JP2000191140A (ja) | リニアモ―タを用いた搬送システム | |
| JPH0252829U (de) | ||
| JP2547403B2 (ja) | 真空装置用磁気浮上搬送装置 | |
| JP5353107B2 (ja) | 搬送装置 | |
| JPS60261302A (ja) | 高真空中の物品搬送装置 | |
| JP4165117B2 (ja) | 真空容器内搬送装置 | |
| JPH0741992B2 (ja) | 磁気浮上搬送装置 | |
| JPS61295926A (ja) | 真空装置用磁気浮上搬送装置 | |
| JPH09199516A (ja) | 搬送装置 | |
| JP2745075B2 (ja) | 磁気浮上式搬送設備 | |
| JPH0576242B2 (de) | ||
| JPS63174895A (ja) | 磁気浮上式搬送マニピユレ−タ | |
| KR102439631B1 (ko) | 자기 부상 이송 장치 | |
| JP7379130B2 (ja) | 搬送装置 | |
| JPH01271133A (ja) | ワーク搬送装置 | |
| JPH08172706A (ja) | ガス浮上搬送装置 | |
| JPS62173907A (ja) | リニアモ−タ利用の磁気浮上式搬送設備 | |
| JPH0327454B2 (de) |