JPS624882U - - Google Patents
Info
- Publication number
- JPS624882U JPS624882U JP9514885U JP9514885U JPS624882U JP S624882 U JPS624882 U JP S624882U JP 9514885 U JP9514885 U JP 9514885U JP 9514885 U JP9514885 U JP 9514885U JP S624882 U JPS624882 U JP S624882U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- outside
- movable element
- body member
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005339 levitation Methods 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims 1
Landscapes
- Linear Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9514885U JPH0312057Y2 (de) | 1985-06-25 | 1985-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9514885U JPH0312057Y2 (de) | 1985-06-25 | 1985-06-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS624882U true JPS624882U (de) | 1987-01-13 |
| JPH0312057Y2 JPH0312057Y2 (de) | 1991-03-22 |
Family
ID=30959363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9514885U Expired JPH0312057Y2 (de) | 1985-06-25 | 1985-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312057Y2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004040089A (ja) * | 2002-05-21 | 2004-02-05 | Otb Group Bv | 基板処理装置 |
| JP2014128177A (ja) * | 2012-12-27 | 2014-07-07 | Sinfonia Technology Co Ltd | 搬送装置 |
-
1985
- 1985-06-25 JP JP9514885U patent/JPH0312057Y2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004040089A (ja) * | 2002-05-21 | 2004-02-05 | Otb Group Bv | 基板処理装置 |
| JP4578784B2 (ja) * | 2002-05-21 | 2010-11-10 | オーテーベー、ソーラー、ベスローテン、フェンノートシャップ | 基板処理装置 |
| JP2014128177A (ja) * | 2012-12-27 | 2014-07-07 | Sinfonia Technology Co Ltd | 搬送装置 |
| KR20140085346A (ko) * | 2012-12-27 | 2014-07-07 | 신포니아 테크놀로지 가부시끼가이샤 | 반송 장치 |
| TWI574899B (zh) * | 2012-12-27 | 2017-03-21 | Sinfonia Technology Co Ltd | Handling device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0312057Y2 (de) | 1991-03-22 |