JPS624882U - - Google Patents

Info

Publication number
JPS624882U
JPS624882U JP9514885U JP9514885U JPS624882U JP S624882 U JPS624882 U JP S624882U JP 9514885 U JP9514885 U JP 9514885U JP 9514885 U JP9514885 U JP 9514885U JP S624882 U JPS624882 U JP S624882U
Authority
JP
Japan
Prior art keywords
vacuum
outside
movable element
body member
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9514885U
Other languages
Japanese (ja)
Other versions
JPH0312057Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9514885U priority Critical patent/JPH0312057Y2/ja
Publication of JPS624882U publication Critical patent/JPS624882U/ja
Application granted granted Critical
Publication of JPH0312057Y2 publication Critical patent/JPH0312057Y2/ja
Expired legal-status Critical Current

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  • Linear Motors (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案を実施している真空装置用磁気
浮上搬送装置を示す概略斜視図、第２図は本考案
による装置の要部の構成を示す平面図である。 横方向にのびる歯列、１５，１７：縦方向にの
びる歯列。 FIG. 1 is a schematic perspective view showing a magnetic levitation transfer device for a vacuum device embodying the present invention, and FIG. 2 is a plan view showing the configuration of the main parts of the device according to the present invention. Teeth extending in the horizontal direction, 15, 17: Teeth extending in the vertical direction.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空装置内に形成された搬送通路に沿つて案内
される搬送台を浮上支持する浮上体部材を有し、
上記浮上体部材を真空の外から動作制御する浮上
維持手段を真空装置壁の外側に設け、上記浮上体
部材を真空の外から駆動する駆動手段を真空装置
壁の外側に設けた真空装置用磁気浮上搬送装置に
おいて、上記駆動手段は上記浮上体部材に取り付
けられた磁性体の可動子と、上記可動子に対向し
た位置で真空装置壁に設けられ、上記可動子を駆
動するため順次励磁するようにされた多数の巻線
を真空装置壁の外側に備えた磁性体の固定子とを
有し、上記可動子および固定子の対向する面にそ
れぞれ横方向および縦方向にのびる歯列を設けて
いることを特徴とする真空装置用磁気浮上搬送装
置の駆動装置。 It has a floating body member that levitates and supports a conveyance table guided along a conveyance path formed in the vacuum device,
A magnet for a vacuum apparatus, wherein a levitation maintaining means for controlling the operation of the floating body member from outside the vacuum is provided on the outside of the wall of the vacuum apparatus, and a driving means for driving the floating body member from outside the vacuum is provided on the outside of the vacuum apparatus wall. In the floating conveyance device, the driving means includes a magnetic movable element attached to the floating body member, and is provided on a wall of the vacuum device at a position opposite to the movable element, and is configured to sequentially excite the movable element to drive the movable element. and a magnetic stator having a large number of windings arranged on the outside of the vacuum device wall, and tooth rows extending in the horizontal and vertical directions are provided on opposing surfaces of the movable element and the stator, respectively. A drive device for a magnetic levitation transfer device for vacuum equipment, characterized in that:
JP9514885U 1985-06-25 1985-06-25 Expired JPH0312057Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9514885U JPH0312057Y2 (en) 1985-06-25 1985-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9514885U JPH0312057Y2 (en) 1985-06-25 1985-06-25

Publications (2)

Publication Number Publication Date
JPS624882U true JPS624882U (en) 1987-01-13
JPH0312057Y2 JPH0312057Y2 (en) 1991-03-22

Family

ID=30959363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9514885U Expired JPH0312057Y2 (en) 1985-06-25 1985-06-25

Country Status (1)

Country Link
JP (1) JPH0312057Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004040089A (en) * 2002-05-21 2004-02-05 Otb Group Bv Substrate processing equipment
KR20140085346A (en) * 2012-12-27 2014-07-07 신포니아 테크놀로지 가부시끼가이샤 Conveying system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004040089A (en) * 2002-05-21 2004-02-05 Otb Group Bv Substrate processing equipment
JP4578784B2 (en) * 2002-05-21 2010-11-10 オーテーベー、ソーラー、ベスローテン、フェンノートシャップ Substrate processing equipment
KR20140085346A (en) * 2012-12-27 2014-07-07 신포니아 테크놀로지 가부시끼가이샤 Conveying system
JP2014128177A (en) * 2012-12-27 2014-07-07 Sinfonia Technology Co Ltd Transportation device
TWI574899B (en) * 2012-12-27 2017-03-21 Sinfonia Technology Co Ltd Handling device

Also Published As

Publication number Publication date
JPH0312057Y2 (en) 1991-03-22

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