JPH0252829U - - Google Patents

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Publication number
JPH0252829U
JPH0252829U JP13172688U JP13172688U JPH0252829U JP H0252829 U JPH0252829 U JP H0252829U JP 13172688 U JP13172688 U JP 13172688U JP 13172688 U JP13172688 U JP 13172688U JP H0252829 U JPH0252829 U JP H0252829U
Authority
JP
Japan
Prior art keywords
conveyance
carrier
vacuum processing
processing furnace
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13172688U
Other languages
Japanese (ja)
Other versions
JPH07435Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988131726U priority Critical patent/JPH07435Y2/en
Publication of JPH0252829U publication Critical patent/JPH0252829U/ja
Application granted granted Critical
Publication of JPH07435Y2 publication Critical patent/JPH07435Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Non-Mechanical Conveyors (AREA)
  • Framework For Endless Conveyors (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの考案に係る真空処理炉の搬送装置
の実施例１を示す斜視説明図、第２図は第１図中
方向から見た矢視図、第３図は第２図中部詳
細図、第４図はこの考案に係る真空処理炉の搬送
装置の実施例２を示す第２図に相当する説明図、
第５図は従来における真空処理炉の搬送装置の一
例を示す説明図である。 符号の説明、１……真空処理炉、６……ガラス
基板（被処理材）、２０……搬送キヤリア、２１
……垂直ベース、３０……駆動搬送手段、５０…
…吸引型マグネツトカツプリング（非接触型案内
保持手段）、７１……固定子、７２……可動子。 Fig. 1 is a perspective explanatory view showing Embodiment 1 of a conveying device for a vacuum processing furnace according to this invention, Fig. 2 is a view taken from the direction of the arrow in Fig. 1, and Fig. 3 is a detailed view of the middle part of Fig. 2. , FIG. 4 is an explanatory diagram corresponding to FIG. 2 showing a second embodiment of a conveying device for a vacuum processing furnace according to this invention,
FIG. 5 is an explanatory diagram showing an example of a conventional conveying device for a vacuum processing furnace. Explanation of symbols, 1...Vacuum processing furnace, 6...Glass substrate (material to be processed), 20...Transportation carrier, 21
...Vertical base, 30... Drive conveyance means, 50...
...Suction type magnetic coupling (non-contact type guide holding means), 71... Stator, 72... Mover.

Claims (1)

【実用新案登録請求の範囲】 １ 被処理材６が略垂直状態で保持される垂直ベ
ース２１を有する搬送キヤリア２０と、 この搬送キヤリア２０の下部側に設けられて真
空処理炉１内にて搬送キヤリア２０を駆動搬送す
る駆動搬送手段３０と、 上記搬送キヤリア２０の垂直ベース２１の上部
を非接触状態で案内保持する非接触型案内保持手
段５０とを備えてなる真空処理炉の搬送装置。 ２ 請求項１記載のものにおいて、非接触型案内
保持手段５０が垂直ベース２１の上部を両側から
均等吸引する吸引型マグネツトカツプリングで構
成されていることを特徴とする真空処理炉の搬送
装置。 ３ 請求項１記載のものにおいて、駆動搬送手段
３０は固定子７１に対して非接触移動する可動子
７２を有する磁気浮上型のリニアモータ搬送系か
らなり、上記可動子７２に搬送キヤリア２０の下
部を固定するようにしたことを特徴とする真空処
理炉の搬送装置。[Claims for Utility Model Registration] 1. A transport carrier 20 having a vertical base 21 on which the material to be processed 6 is held in a substantially vertical state; A conveyance device for a vacuum processing furnace, comprising: a drive conveyance means 30 for driving and conveying the carrier 20; and a non-contact type guiding and holding means 50 for guiding and holding the upper part of the vertical base 21 of the conveyance carrier 20 in a non-contact state. 2. The conveying device for a vacuum processing furnace according to claim 1, wherein the non-contact guiding and holding means 50 is constituted by a suction type magnetic coupling that evenly suctions the upper part of the vertical base 21 from both sides. . 3. In the device according to claim 1, the drive conveyance means 30 is composed of a magnetically levitated linear motor conveyance system having a movable element 72 that moves in a non-contact manner with respect to a stator 71, and the lower part of the conveyance carrier 20 is attached to the movable element 72. 1. A conveying device for a vacuum processing furnace, characterized in that it is fixed.
JP1988131726U 1988-10-11 1988-10-11 Vacuum processing furnace transfer device Expired - Lifetime JPH07435Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988131726U JPH07435Y2 (en) 1988-10-11 1988-10-11 Vacuum processing furnace transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988131726U JPH07435Y2 (en) 1988-10-11 1988-10-11 Vacuum processing furnace transfer device

Publications (2)

Publication Number Publication Date
JPH0252829U true JPH0252829U (en) 1990-04-17
JPH07435Y2 JPH07435Y2 (en) 1995-01-11

Family

ID=31388059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988131726U Expired - Lifetime JPH07435Y2 (en) 1988-10-11 1988-10-11 Vacuum processing furnace transfer device

Country Status (1)

Country Link
JP (1) JPH07435Y2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004040089A (en) * 2002-05-21 2004-02-05 Otb Group Bv Substrate processing equipment
JP2007261814A (en) * 2006-03-29 2007-10-11 Applied Materials Gmbh & Co Kg Vacuum transport device having movable guide rail
JP2007269071A (en) * 2006-03-30 2007-10-18 Asyst Shinko Inc Unmanned transporting device
KR100880877B1 (en) * 2007-11-02 2009-01-30 한국기계연구원 Maglev-type substrate transfer apparatus
WO2010026733A1 (en) * 2008-09-05 2010-03-11 キヤノンアネルバ株式会社 Substrate transfer apparatus and vacuum film-forming apparatus
JP2010159167A (en) * 2010-02-04 2010-07-22 Canon Anelva Corp Substrate carrying device and vacuum processing device
KR101271112B1 (en) * 2011-02-01 2013-06-04 (주)이루자 Vaccum processing apparatus
KR101353527B1 (en) * 2011-09-16 2014-01-21 주식회사 에스에프에이 Apparatus for transferring substrate
JP2019537236A (en) * 2017-08-25 2019-12-19 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Assembly for raising or lowering a carrier, apparatus for transporting a carrier in a vacuum chamber, and method for raising or lowering a carrier

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101409524B1 (en) * 2007-05-28 2014-06-20 엘지디스플레이 주식회사 Apparatus for transferring substrates
WO2019052657A1 (en) * 2017-09-15 2019-03-21 Applied Materials, Inc. Method for determining alignment of a carrier levitation system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632413U (en) * 1979-08-20 1981-03-30
JPS6344603U (en) * 1986-09-09 1988-03-25
JPS63185712A (en) * 1987-01-28 1988-08-01 Nippon Soken Inc Carrier mechanism for vacuum deposition device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632413U (en) * 1979-08-20 1981-03-30
JPS6344603U (en) * 1986-09-09 1988-03-25
JPS63185712A (en) * 1987-01-28 1988-08-01 Nippon Soken Inc Carrier mechanism for vacuum deposition device

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004040089A (en) * 2002-05-21 2004-02-05 Otb Group Bv Substrate processing equipment
JP4578784B2 (en) * 2002-05-21 2010-11-10 オーテーベー、ソーラー、ベスローテン、フェンノートシャップ Substrate processing equipment
JP2007261814A (en) * 2006-03-29 2007-10-11 Applied Materials Gmbh & Co Kg Vacuum transport device having movable guide rail
JP4583396B2 (en) * 2006-03-29 2010-11-17 アプリート マテリアールス ゲーエムベーハー ウント コー． カーゲー Vacuum transfer device with movable guide rail
JP2007269071A (en) * 2006-03-30 2007-10-18 Asyst Shinko Inc Unmanned transporting device
KR100880877B1 (en) * 2007-11-02 2009-01-30 한국기계연구원 Maglev-type substrate transfer apparatus
WO2010026733A1 (en) * 2008-09-05 2010-03-11 キヤノンアネルバ株式会社 Substrate transfer apparatus and vacuum film-forming apparatus
JP2010159167A (en) * 2010-02-04 2010-07-22 Canon Anelva Corp Substrate carrying device and vacuum processing device
KR101271112B1 (en) * 2011-02-01 2013-06-04 (주)이루자 Vaccum processing apparatus
KR101353527B1 (en) * 2011-09-16 2014-01-21 주식회사 에스에프에이 Apparatus for transferring substrate
JP2019537236A (en) * 2017-08-25 2019-12-19 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Assembly for raising or lowering a carrier, apparatus for transporting a carrier in a vacuum chamber, and method for raising or lowering a carrier

Also Published As

Publication number Publication date
JPH07435Y2 (en) 1995-01-11

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