JPS63201332U - - Google Patents

Info

Publication number
JPS63201332U
JPS63201332U JP9242487U JP9242487U JPS63201332U JP S63201332 U JPS63201332 U JP S63201332U JP 9242487 U JP9242487 U JP 9242487U JP 9242487 U JP9242487 U JP 9242487U JP S63201332 U JPS63201332 U JP S63201332U
Authority
JP
Japan
Prior art keywords
levitation
magnetic
wafer transfer
magnet
guide rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9242487U
Other languages
Japanese (ja)
Other versions
JPH0638427Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987092424U priority Critical patent/JPH0638427Y2/en
Publication of JPS63201332U publication Critical patent/JPS63201332U/ja
Application granted granted Critical
Publication of JPH0638427Y2 publication Critical patent/JPH0638427Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図、第２図は、この考案の実施例を示す図
で、第１図は、第２図の−線断面図拡大図の
一部を示す図、第２図は、斜視図である。 １……真空容器、３……ガイドレール、５……
浮上用磁場コイル、６……リニアモータ用コイル
。 1 and 2 are views showing an embodiment of this invention, FIG. 1 is a view showing a part of an enlarged sectional view taken along the line - in FIG. 2, and FIG. 2 is a perspective view. . 1... Vacuum container, 3... Guide rail, 5...
Magnetic field coil for levitation, 6... Coil for linear motor.

Claims (1)

【実用新案登録請求の範囲】 (1) 真空容器内に磁性体のガイドレールを設け
、該ガイドレールに、本体に設けた浮上用磁石と
リニアモータ用コイルを遊嵌合した磁気浮上型ウ
エハ搬送装置。 (2) 浮上用磁石が、永久磁石であるこを特徴と
する実用新案登録請求の範囲第１項記載の磁気浮
上型ウエハ搬送装置。 (3) 浮上用磁石が、磁場コイルにより形成され
る電磁石であることを特徴とする実用新案登録請
求の範囲第１項記載の磁気浮上型ウエハ搬送装置
。[Scope of Claim for Utility Model Registration] (1) Magnetic levitation type wafer transfer in which a magnetic guide rail is provided in a vacuum container, and a levitation magnet provided on the main body and a linear motor coil are loosely fitted to the guide rail. Device. (2) The magnetically levitated wafer transfer device according to claim 1, wherein the levitation magnet is a permanent magnet. (3) The magnetic levitation type wafer transfer device according to claim 1, wherein the levitation magnet is an electromagnet formed by a magnetic field coil.
JP1987092424U 1987-06-16 1987-06-16 Magnetically levitated wafer transfer device Expired - Lifetime JPH0638427Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987092424U JPH0638427Y2 (en) 1987-06-16 1987-06-16 Magnetically levitated wafer transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987092424U JPH0638427Y2 (en) 1987-06-16 1987-06-16 Magnetically levitated wafer transfer device

Publications (2)

Publication Number Publication Date
JPS63201332U true JPS63201332U (en) 1988-12-26
JPH0638427Y2 JPH0638427Y2 (en) 1994-10-05

Family

ID=30954118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987092424U Expired - Lifetime JPH0638427Y2 (en) 1987-06-16 1987-06-16 Magnetically levitated wafer transfer device

Country Status (1)

Country Link
JP (1) JPH0638427Y2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05181530A (en) * 1992-01-07 1993-07-23 Daifuku Co Ltd Magnetically levitated carrier
JPH0616206A (en) * 1992-07-03 1994-01-25 Shinko Electric Co Ltd Transportation system inside clean room
JP2019532486A (en) * 2017-08-24 2019-11-07 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Apparatus and method for non-contact transfer of devices in a vacuum processing system
JP2020192241A (en) * 2019-05-30 2020-12-03 日本金銭機械株式会社 Paper sheet conveyance mechanism
JP2020196630A (en) * 2020-08-11 2020-12-10 日本金銭機械株式会社 Air stream control device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6026130A (en) * 1983-07-21 1985-02-09 Sanshin Ind Co Ltd Suction pressure control piping for internal-combustion engine
JPS60237848A (en) * 1984-05-09 1985-11-26 Mitsubishi Electric Corp Linear motor conveyor
JPS6293120A (en) * 1985-10-16 1987-04-28 Daifuku Co Ltd Load transport device using linear motor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6026130A (en) * 1983-07-21 1985-02-09 Sanshin Ind Co Ltd Suction pressure control piping for internal-combustion engine
JPS60237848A (en) * 1984-05-09 1985-11-26 Mitsubishi Electric Corp Linear motor conveyor
JPS6293120A (en) * 1985-10-16 1987-04-28 Daifuku Co Ltd Load transport device using linear motor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05181530A (en) * 1992-01-07 1993-07-23 Daifuku Co Ltd Magnetically levitated carrier
JPH0616206A (en) * 1992-07-03 1994-01-25 Shinko Electric Co Ltd Transportation system inside clean room
JP2019532486A (en) * 2017-08-24 2019-11-07 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Apparatus and method for non-contact transfer of devices in a vacuum processing system
JP2020192241A (en) * 2019-05-30 2020-12-03 日本金銭機械株式会社 Paper sheet conveyance mechanism
WO2020241081A1 (en) * 2019-05-30 2020-12-03 日本金銭機械株式会社 Paper sheet transport mechanism and airflow control device
JP2020196630A (en) * 2020-08-11 2020-12-10 日本金銭機械株式会社 Air stream control device

Also Published As

Publication number Publication date
JPH0638427Y2 (en) 1994-10-05

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