JPH03120037U - - Google Patents

Info

Publication number
JPH03120037U
JPH03120037U JP1990029296U JP2929690U JPH03120037U JP H03120037 U JPH03120037 U JP H03120037U JP 1990029296 U JP1990029296 U JP 1990029296U JP 2929690 U JP2929690 U JP 2929690U JP H03120037 U JPH03120037 U JP H03120037U
Authority
JP
Japan
Prior art keywords
gas
gas supply
supply chamber
heating
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1990029296U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0731540Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990029296U priority Critical patent/JPH0731540Y2/ja
Priority to KR2019910003484U priority patent/KR970004979Y1/ko
Publication of JPH03120037U publication Critical patent/JPH03120037U/ja
Application granted granted Critical
Publication of JPH0731540Y2 publication Critical patent/JPH0731540Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Die Bonding (AREA)
  • Sampling And Sample Adjustment (AREA)
JP1990029296U 1990-03-22 1990-03-22 加熱硬化装置 Expired - Lifetime JPH0731540Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1990029296U JPH0731540Y2 (ja) 1990-03-22 1990-03-22 加熱硬化装置
KR2019910003484U KR970004979Y1 (ko) 1990-03-22 1991-03-15 가열경화장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990029296U JPH0731540Y2 (ja) 1990-03-22 1990-03-22 加熱硬化装置

Publications (2)

Publication Number Publication Date
JPH03120037U true JPH03120037U (enExample) 1991-12-10
JPH0731540Y2 JPH0731540Y2 (ja) 1995-07-19

Family

ID=12272281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990029296U Expired - Lifetime JPH0731540Y2 (ja) 1990-03-22 1990-03-22 加熱硬化装置

Country Status (2)

Country Link
JP (1) JPH0731540Y2 (enExample)
KR (1) KR970004979Y1 (enExample)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991768A (enExample) * 1973-01-05 1974-09-02
JPS59131154U (ja) * 1983-02-22 1984-09-03 株式会社東芝 マウントキユア装置
JPS59208734A (ja) * 1983-05-13 1984-11-27 Hitachi Ltd ペレツトボンデイング装置
JPS63144528A (ja) * 1986-12-09 1988-06-16 Nec Corp 半導体装置の製造装置
JPH01295428A (ja) * 1988-05-24 1989-11-29 Mitsubishi Electric Corp ダイボンダ用の樹脂硬化装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991768A (enExample) * 1973-01-05 1974-09-02
JPS59131154U (ja) * 1983-02-22 1984-09-03 株式会社東芝 マウントキユア装置
JPS59208734A (ja) * 1983-05-13 1984-11-27 Hitachi Ltd ペレツトボンデイング装置
JPS63144528A (ja) * 1986-12-09 1988-06-16 Nec Corp 半導体装置の製造装置
JPH01295428A (ja) * 1988-05-24 1989-11-29 Mitsubishi Electric Corp ダイボンダ用の樹脂硬化装置

Also Published As

Publication number Publication date
KR970004979Y1 (ko) 1997-05-22
KR910017378U (ko) 1991-10-28
JPH0731540Y2 (ja) 1995-07-19

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