JPH031176Y2 - - Google Patents
Info
- Publication number
- JPH031176Y2 JPH031176Y2 JP1982165846U JP16584682U JPH031176Y2 JP H031176 Y2 JPH031176 Y2 JP H031176Y2 JP 1982165846 U JP1982165846 U JP 1982165846U JP 16584682 U JP16584682 U JP 16584682U JP H031176 Y2 JPH031176 Y2 JP H031176Y2
- Authority
- JP
- Japan
- Prior art keywords
- grindstone
- walled
- thin
- substrate
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000006061 abrasive grain Substances 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 19
- 238000005498 polishing Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000000227 grinding Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 239000010953 base metal Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 239000004575 stone Substances 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009837 dry grinding Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16584682U JPS5969852U (ja) | 1982-11-02 | 1982-11-02 | 円筒砥石 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16584682U JPS5969852U (ja) | 1982-11-02 | 1982-11-02 | 円筒砥石 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5969852U JPS5969852U (ja) | 1984-05-11 |
| JPH031176Y2 true JPH031176Y2 (de) | 1991-01-16 |
Family
ID=30363235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16584682U Granted JPS5969852U (ja) | 1982-11-02 | 1982-11-02 | 円筒砥石 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5969852U (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5390091A (en) * | 1977-01-18 | 1978-08-08 | Daichiku Co Ltd | Laminated tary grind stone for use in grinding and method of manufacturing thereof |
-
1982
- 1982-11-02 JP JP16584682U patent/JPS5969852U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5390091A (en) * | 1977-01-18 | 1978-08-08 | Daichiku Co Ltd | Laminated tary grind stone for use in grinding and method of manufacturing thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5969852U (ja) | 1984-05-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3791610B2 (ja) | 鏡面加工用超砥粒ホイール | |
| JPS58160050A (ja) | ウエハ−の面取り加工法およびこれに使用する砥石 | |
| JP4340184B2 (ja) | 砥石 | |
| JPH031176Y2 (de) | ||
| JPH0629401B2 (ja) | 超硬物質をコーティングした砥粒 | |
| JPH0615572A (ja) | 研削砥石 | |
| JPS63207565A (ja) | 研削用複合砥石 | |
| JP2972049B2 (ja) | たんざく状チップを埋設した精密切断用超砥粒ホイール | |
| JP2002301653A (ja) | 石材等の側面形状加工方法及び該方法に使用する研磨ホイール | |
| JP2006205330A (ja) | 砥石 | |
| JPS632669A (ja) | 研削工具 | |
| JPH085020Y2 (ja) | 研磨具 | |
| JP4352588B2 (ja) | 研削砥石 | |
| JPH0111416Y2 (de) | ||
| JPH11207635A (ja) | カップ型砥石およびウェーハの平面研削方法 | |
| JPS61226266A (ja) | 研削盤における研削方法 | |
| JPH0641803Y2 (ja) | 平面研削盤用セグメント砥石 | |
| JPS6312747B2 (de) | ||
| JPH11188642A (ja) | ディスク状研削ホイール | |
| JPH0357426Y2 (de) | ||
| TWI621502B (zh) | Double chemical mechanical polishing trimming system and method thereof | |
| TWI602651B (zh) | A Compound Chemical Mechanical Dresser | |
| JPS5817725Y2 (ja) | ナイフ類の椀型研削砥石 | |
| JPS61226272A (ja) | ウエ−ハ研削用砥石 | |
| JPH0437715Y2 (de) |