JPH03112930U - - Google Patents
Info
- Publication number
- JPH03112930U JPH03112930U JP2098990U JP2098990U JPH03112930U JP H03112930 U JPH03112930 U JP H03112930U JP 2098990 U JP2098990 U JP 2098990U JP 2098990 U JP2098990 U JP 2098990U JP H03112930 U JPH03112930 U JP H03112930U
- Authority
- JP
- Japan
- Prior art keywords
- constant temperature
- substrate
- temperature jacket
- developing device
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000005507 spraying Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 5
- 238000007654 immersion Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2098990U JPH03112930U (zh) | 1990-03-01 | 1990-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2098990U JPH03112930U (zh) | 1990-03-01 | 1990-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03112930U true JPH03112930U (zh) | 1991-11-19 |
Family
ID=31524069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2098990U Pending JPH03112930U (zh) | 1990-03-01 | 1990-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03112930U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160049985A (ko) * | 2014-10-28 | 2016-05-10 | 도쿄엘렉트론가부시키가이샤 | 기판 액 처리 장치 |
-
1990
- 1990-03-01 JP JP2098990U patent/JPH03112930U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160049985A (ko) * | 2014-10-28 | 2016-05-10 | 도쿄엘렉트론가부시키가이샤 | 기판 액 처리 장치 |
| JP2016086116A (ja) * | 2014-10-28 | 2016-05-19 | 東京エレクトロン株式会社 | 基板液処理装置 |
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