JPH0311100B2 - - Google Patents

Info

Publication number
JPH0311100B2
JPH0311100B2 JP14206485A JP14206485A JPH0311100B2 JP H0311100 B2 JPH0311100 B2 JP H0311100B2 JP 14206485 A JP14206485 A JP 14206485A JP 14206485 A JP14206485 A JP 14206485A JP H0311100 B2 JPH0311100 B2 JP H0311100B2
Authority
JP
Japan
Prior art keywords
boat
wafer boat
pusher
wafer
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14206485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS622615A (ja
Inventor
Tatsuo Oketa
Naoki Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Tokuda Seisakusho Co Ltd
Original Assignee
Toshiba Corp
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokuda Seisakusho Co Ltd filed Critical Toshiba Corp
Priority to JP14206485A priority Critical patent/JPS622615A/ja
Publication of JPS622615A publication Critical patent/JPS622615A/ja
Publication of JPH0311100B2 publication Critical patent/JPH0311100B2/ja
Granted legal-status Critical Current

Links

JP14206485A 1985-06-28 1985-06-28 半導体ウェハ処理装置 Granted JPS622615A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14206485A JPS622615A (ja) 1985-06-28 1985-06-28 半導体ウェハ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14206485A JPS622615A (ja) 1985-06-28 1985-06-28 半導体ウェハ処理装置

Publications (2)

Publication Number Publication Date
JPS622615A JPS622615A (ja) 1987-01-08
JPH0311100B2 true JPH0311100B2 (US07709020-20100504-C00032.png) 1991-02-15

Family

ID=15306589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14206485A Granted JPS622615A (ja) 1985-06-28 1985-06-28 半導体ウェハ処理装置

Country Status (1)

Country Link
JP (1) JPS622615A (US07709020-20100504-C00032.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2813659B2 (ja) * 1987-10-07 1998-10-22 東京エレクトロン株式会社 支持装置
JPH08306765A (ja) * 1995-04-28 1996-11-22 Advantest Corp ハンドラ装置用トレイ装着台
CN103286839B (zh) * 2013-05-06 2015-03-11 集保物流设备（中国）有限公司 托盘加工装置

Also Published As

Publication number Publication date
JPS622615A (ja) 1987-01-08

Similar Documents

Publication Publication Date Title
KR102091915B1 (ko) 기판 반송 로봇 및 기판 처리 시스템
JPS6052035A (ja) 半導体ウエ−ハの処理装置
US4934767A (en) Semiconductor wafer carrier input/output drawer
US6132160A (en) Substrate transferring apparatus
JP3025282B2 (ja) ワーク保持装置
JPH0311100B2 (US07709020-20100504-C00032.png)
JP2002076094A (ja) 基板搬送装置
JP2003338531A (ja) 半導体ウエハの搬送装置および熱処理装置
JP2967613B2 (ja) 搬送装置
JPH1025029A (ja) 移載ロボット用ロボットハンド
JP2572844B2 (ja) ワーク加工ラインのパレット交換装置
KR900007807B1 (ko) 가공물의 공급방법
JP4564695B2 (ja) ウェーハカセット並びに半導体ウェーハの搬入方法及び搬出方法
KR200159654Y1 (ko) 반도체 이송장치
JP2000095350A (ja) Ａｇｖ搬送装置
KR0156493B1 (ko) 새도우마스크 프레임 조립체의 이송장치
JP3024005B2 (ja) 搬送方法及び搬送装置
JPH0643026Y2 (ja) 薄板状被処理物の搬送治具
JPH041016Y2 (US07709020-20100504-C00032.png)
JPH0526754Y2 (US07709020-20100504-C00032.png)
JPH07257728A (ja) コンベヤ装置および板材搬送加工設備
KR20060109183A (ko) 웨이퍼 정렬 장치를 갖는 카세트 이송 컨베이어
KR19990040215U (ko) 반도체패키지 제조 장비의 그립퍼장치
JP3186396B2 (ja) パレット搬送装置
JPH0310251A (ja) 板状ワーク搬送装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term