JPH0311098B2 - - Google Patents
Info
- Publication number
- JPH0311098B2 JPH0311098B2 JP61197318A JP19731886A JPH0311098B2 JP H0311098 B2 JPH0311098 B2 JP H0311098B2 JP 61197318 A JP61197318 A JP 61197318A JP 19731886 A JP19731886 A JP 19731886A JP H0311098 B2 JPH0311098 B2 JP H0311098B2
- Authority
- JP
- Japan
- Prior art keywords
- electromagnet
- direct current
- attracted
- stopper
- electromagnets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 9
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61197318A JPS6354739A (ja) | 1986-08-25 | 1986-08-25 | 磁気吸着ピツクアツプの位置決め方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61197318A JPS6354739A (ja) | 1986-08-25 | 1986-08-25 | 磁気吸着ピツクアツプの位置決め方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6354739A JPS6354739A (ja) | 1988-03-09 |
| JPH0311098B2 true JPH0311098B2 (OSRAM) | 1991-02-15 |
Family
ID=16372461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61197318A Granted JPS6354739A (ja) | 1986-08-25 | 1986-08-25 | 磁気吸着ピツクアツプの位置決め方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6354739A (OSRAM) |
-
1986
- 1986-08-25 JP JP61197318A patent/JPS6354739A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6354739A (ja) | 1988-03-09 |
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