JPH0310388B2 - - Google Patents

Info

Publication number
JPH0310388B2
JPH0310388B2 JP8760387A JP8760387A JPH0310388B2 JP H0310388 B2 JPH0310388 B2 JP H0310388B2 JP 8760387 A JP8760387 A JP 8760387A JP 8760387 A JP8760387 A JP 8760387A JP H0310388 B2 JPH0310388 B2 JP H0310388B2
Authority
JP
Japan
Prior art keywords
water
activated carbon
ion
ion exchange
fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8760387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63156591A (ja
Inventor
Nami Kubo
Toshio Yoshioka
Masaru Noyori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Publication of JPS63156591A publication Critical patent/JPS63156591A/ja
Publication of JPH0310388B2 publication Critical patent/JPH0310388B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatment Of Water By Ion Exchange (AREA)
  • Water Treatment By Sorption (AREA)
JP8760387A 1986-08-28 1987-04-09 超純水の製造法 Granted JPS63156591A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP20256586 1986-08-28
JP61-202565 1986-08-28

Publications (2)

Publication Number Publication Date
JPS63156591A JPS63156591A (ja) 1988-06-29
JPH0310388B2 true JPH0310388B2 (fr) 1991-02-13

Family

ID=16459598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8760387A Granted JPS63156591A (ja) 1986-08-28 1987-04-09 超純水の製造法

Country Status (1)

Country Link
JP (1) JPS63156591A (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0794036B2 (ja) * 1988-07-05 1995-10-11 東レ株式会社 超純水の製造方法
JPH0343396U (fr) * 1989-09-04 1991-04-23
US5378802A (en) * 1991-09-03 1995-01-03 Ocg Microelectronic Materials, Inc. Method for removing impurities from resist components and novolak resins
JP6082192B2 (ja) * 2012-06-11 2017-02-15 野村マイクロ・サイエンス株式会社 純水製造装置
ES2973146T3 (es) 2017-02-13 2024-06-18 Merck Patent Gmbh Método y sistema para producir agua ultrapura
EP3580184A1 (fr) * 2017-02-13 2019-12-18 Merck Patent GmbH Procédé de production d'eau ultra pure
JP7132932B2 (ja) 2017-02-13 2022-09-07 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング 超純水を製造するための方法
JP7108622B2 (ja) * 2017-02-13 2022-07-28 メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング 超純水を製造するための方法

Also Published As

Publication number Publication date
JPS63156591A (ja) 1988-06-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees