JPH0299557U - - Google Patents

Info

Publication number
JPH0299557U
JPH0299557U JP900889U JP900889U JPH0299557U JP H0299557 U JPH0299557 U JP H0299557U JP 900889 U JP900889 U JP 900889U JP 900889 U JP900889 U JP 900889U JP H0299557 U JPH0299557 U JP H0299557U
Authority
JP
Japan
Prior art keywords
analysis
accelerator
potential
fluctuations
microbeam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP900889U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP900889U priority Critical patent/JPH0299557U/ja
Publication of JPH0299557U publication Critical patent/JPH0299557U/ja
Pending legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの考案の実施例を示す配置図、第2
図は分析電磁石の断面図、第3図は従来例の配置
図である。 1……イオン源、2……加速器、3……分析電
磁石、5……ビーム集束部、6……リツプル検出
器、8……電位補正増幅電源、11……分析管。
Figure 1 is a layout diagram showing an embodiment of this invention;
The figure is a sectional view of an analysis electromagnet, and FIG. 3 is a layout diagram of a conventional example. DESCRIPTION OF SYMBOLS 1... Ion source, 2... Accelerator, 3... Analysis electromagnet, 5... Beam focusing section, 6... Ripple detector, 8... Potential correction amplification power supply, 11... Analysis tube.

Claims (1)

【実用新案登録請求の範囲】 加速器と、前記加速器によつて加速されたビー
ムを分析する分析電磁石と、前記分析電磁石によ
つて分析されたビームを集束するビーム集束部と
を備えてなるマイクロビーム発生装置において、 前記分析電磁石の分析管を大地に対して絶縁す
るとともに、前記加速器の加速電圧のリツプル変
動分による前記ビームの位置変動を補正するよう
に、前記加速電圧のリツプル変動分に対応する電
位を前記分析管の電位に加える電位補正増幅電源
とを備えたマイクロビーム発生装置。
[Claims for Utility Model Registration] A microbeam comprising an accelerator, an analysis electromagnet that analyzes a beam accelerated by the accelerator, and a beam focusing unit that focuses the beam analyzed by the analysis electromagnet. In the generator, the analysis tube of the analysis electromagnet is insulated from the ground, and the analyzer is configured to correspond to ripple fluctuations in the accelerating voltage so as to correct fluctuations in the position of the beam due to ripple fluctuations in the accelerating voltage of the accelerator. A microbeam generator comprising a potential correction amplification power source that adds a potential to the potential of the analysis tube.
JP900889U 1989-01-26 1989-01-26 Pending JPH0299557U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP900889U JPH0299557U (en) 1989-01-26 1989-01-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP900889U JPH0299557U (en) 1989-01-26 1989-01-26

Publications (1)

Publication Number Publication Date
JPH0299557U true JPH0299557U (en) 1990-08-08

Family

ID=31215380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP900889U Pending JPH0299557U (en) 1989-01-26 1989-01-26

Country Status (1)

Country Link
JP (1) JPH0299557U (en)

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