JPH0383937U - - Google Patents
Info
- Publication number
- JPH0383937U JPH0383937U JP14555789U JP14555789U JPH0383937U JP H0383937 U JPH0383937 U JP H0383937U JP 14555789 U JP14555789 U JP 14555789U JP 14555789 U JP14555789 U JP 14555789U JP H0383937 U JPH0383937 U JP H0383937U
- Authority
- JP
- Japan
- Prior art keywords
- triangular wave
- current
- wave current
- wave oscillator
- oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Electron Beam Exposure (AREA)
Description
第１図はこの考案の実施例を示す平面図、第２
図は同正面図、第３図は動作説明用の電流波形図
と電子線軌道とを示す図、第４図は従来例の正面
図、第５図は動作説明用の電流波形図と電子線軌
道とを示す図、第６図は動作説明用の部分平面図
である。
１…加速管、３…走査管、４…照射窓、５…走
査コイル、６…偏向コイル、７…三角波発振器、
８…方形波発振器、１１…三角波発振器、１２…
加算器。
Figure 1 is a plan view showing an embodiment of this invention;
The figure is a front view of the same, Figure 3 is a diagram showing a current waveform diagram and an electron beam trajectory for explaining the operation, Figure 4 is a front view of the conventional example, and Figure 5 is a current waveform diagram and an electron beam diagram for explaining the operation. FIG. 6 is a partial plan view for explaining the operation. 1... Accelerating tube, 3... Scanning tube, 4... Irradiation window, 5... Scanning coil, 6... Deflection coil, 7... Triangular wave oscillator,
8...square wave oscillator, 11...triangle wave oscillator, 12...
Adder.
Claims (1)
波電流によつて励磁され、電子線を走査する走査
コイルと、方形波発振器と、前記方形波発振器か
らの方形波電流によつて励磁され、前記走査コイ
ルによる走査方向に対して直交する方向に電子線
を偏向させる偏向コイルを備え、前記走査コイル
と偏向コイルとによつて前記電子線の走査の軌道
を矩形状とする電子線照射装置において、 前記三角波電流のゼロ点にピーク点が重なる三
角波電流を発生する三角波発振器と、この三角波
発振器からの三角波電流を前記方形波電流に同期
して加算する加算器とを設け、前記加算器からの
電流によつて前記偏向コイルを励磁してなる電子
線照射装置。[Claims for Utility Model Registration] A triangular wave oscillator, a scanning coil that is excited by a triangular wave current from the triangular wave oscillator and scans an electron beam, a square wave oscillator, and a square wave current from the square wave oscillator. a deflection coil that is excited by the scanning coil and deflects the electron beam in a direction perpendicular to the scanning direction of the scanning coil; The line irradiation device includes a triangular wave oscillator that generates a triangular wave current whose peak point overlaps the zero point of the triangular wave current, and an adder that adds the triangular wave current from the triangular wave oscillator to the square wave current in synchronization with the square wave current. An electron beam irradiation device in which the deflection coil is excited by a current from an adder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14555789U JPH0383937U (en) | 1989-12-18 | 1989-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14555789U JPH0383937U (en) | 1989-12-18 | 1989-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0383937U true JPH0383937U (en) | 1991-08-26 |
Family
ID=31692186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14555789U Pending JPH0383937U (en) | 1989-12-18 | 1989-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0383937U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1183706A1 (en) * | 2000-04-13 | 2002-03-06 | Ebara Corporation | Method and apparatus for electron beam irradiation |
-
1989
- 1989-12-18 JP JP14555789U patent/JPH0383937U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1183706A1 (en) * | 2000-04-13 | 2002-03-06 | Ebara Corporation | Method and apparatus for electron beam irradiation |
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