JPH0229151U - - Google Patents
Info
- Publication number
- JPH0229151U JPH0229151U JP10689088U JP10689088U JPH0229151U JP H0229151 U JPH0229151 U JP H0229151U JP 10689088 U JP10689088 U JP 10689088U JP 10689088 U JP10689088 U JP 10689088U JP H0229151 U JPH0229151 U JP H0229151U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- mass spectrometry
- light source
- parabolic mirror
- ionization device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004949 mass spectrometry Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 230000007935 neutral effect Effects 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案の一実施例を説明するための装
置構成図、第２図は要部を説明するための図、第
３図は従来例を説明するための図である。
１……試料、２……一次イオンビーム源、３…
…エキシマレーザー光源、５……引き出し電極、
６……質量分析系、１０……回転放物面鏡。
FIG. 1 is an apparatus configuration diagram for explaining an embodiment of the present invention, FIG. 2 is a diagram for explaining the main parts, and FIG. 3 is a diagram for explaining a conventional example. 1... Sample, 2... Primary ion beam source, 3...
...excimer laser light source, 5...extraction electrode,
6... Mass spectrometry system, 10... Parabolic mirror of revolution.
Claims (1)
放出される中性粒子にレーザー光を照射してイオ
ン化する質量分析用イオン化装置において、前記
レーザー光の光源に対向する位置に放物面鏡を設
け、該放物面鏡によつて前記光源からのレーザー
光を前記中性粒子雰囲気中に集束させるようにし
たことを特徴とするレーザー光を用いた質量分析
用イオン化装置。 In an ionization device for mass spectrometry that irradiates a sample with a primary ion beam and ionizes neutral particles emitted from the sample with a laser beam, a parabolic mirror is provided at a position facing the light source of the laser beam. . An ionization device for mass spectrometry using laser light, characterized in that the parabolic mirror focuses the laser light from the light source into the neutral particle atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10689088U JPH0229151U (en) | 1988-08-12 | 1988-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10689088U JPH0229151U (en) | 1988-08-12 | 1988-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0229151U true JPH0229151U (en) | 1990-02-26 |
Family
ID=31340806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10689088U Pending JPH0229151U (en) | 1988-08-12 | 1988-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229151U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015179572A (en) * | 2014-03-18 | 2015-10-08 | 株式会社東芝 | Sputter neutral particle mass spectroscope |
| WO2018173935A1 (en) * | 2017-03-21 | 2018-09-27 | 学校法人工学院大学 | Mass spectroscope and mass spectrometry |
-
1988
- 1988-08-12 JP JP10689088U patent/JPH0229151U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015179572A (en) * | 2014-03-18 | 2015-10-08 | 株式会社東芝 | Sputter neutral particle mass spectroscope |
| WO2018173935A1 (en) * | 2017-03-21 | 2018-09-27 | 学校法人工学院大学 | Mass spectroscope and mass spectrometry |
| JP2018156904A (en) * | 2017-03-21 | 2018-10-04 | 学校法人 工学院大学 | Mass spectrometer and mass spectrometry method |
| EP3605584A4 (en) * | 2017-03-21 | 2020-12-16 | Kogakuin University | Mass spectroscope and mass spectrometry |
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