JPH029530B2 - - Google Patents

Info

Publication number
JPH029530B2
JPH029530B2 JP22515984A JP22515984A JPH029530B2 JP H029530 B2 JPH029530 B2 JP H029530B2 JP 22515984 A JP22515984 A JP 22515984A JP 22515984 A JP22515984 A JP 22515984A JP H029530 B2 JPH029530 B2 JP H029530B2
Authority
JP
Japan
Prior art keywords
melting point
silicon
point metal
high melting
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22515984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61103686A (ja
Inventor
Kenichi Hijikata
Tadashi Sugihara
Masashi Komabayashi
Shuji Hida
Tosha Urabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP22515984A priority Critical patent/JPS61103686A/ja
Publication of JPS61103686A publication Critical patent/JPS61103686A/ja
Publication of JPH029530B2 publication Critical patent/JPH029530B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C23C26/02—Coating not provided for in groups C23C2/00 - C23C24/00 applying molten material to the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
JP22515984A 1984-10-26 1984-10-26 高融点金属材と珪素材の接合方法 Granted JPS61103686A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22515984A JPS61103686A (ja) 1984-10-26 1984-10-26 高融点金属材と珪素材の接合方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22515984A JPS61103686A (ja) 1984-10-26 1984-10-26 高融点金属材と珪素材の接合方法

Publications (2)

Publication Number Publication Date
JPS61103686A JPS61103686A (ja) 1986-05-22
JPH029530B2 true JPH029530B2 (enrdf_load_stackoverflow) 1990-03-02

Family

ID=16824865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22515984A Granted JPS61103686A (ja) 1984-10-26 1984-10-26 高融点金属材と珪素材の接合方法

Country Status (1)

Country Link
JP (1) JPS61103686A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2588241B2 (ja) * 1988-04-05 1997-03-05 株式会社東芝 スパッタリングターゲット
JP5766966B2 (ja) * 2011-01-31 2015-08-19 新日鐵住金株式会社 Ｎａ含有Ｍｏターゲット及びその製造方法
CN107497932A (zh) * 2017-06-23 2017-12-22 成都飞机工业（集团）有限责任公司 一种可切削塑料拉型模及其制造方法

Also Published As

Publication number Publication date
JPS61103686A (ja) 1986-05-22

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