JPS61103686A - 高融点金属材と珪素材の接合方法 - Google Patents

高融点金属材と珪素材の接合方法

Info

Publication number
JPS61103686A
JPS61103686A JP22515984A JP22515984A JPS61103686A JP S61103686 A JPS61103686 A JP S61103686A JP 22515984 A JP22515984 A JP 22515984A JP 22515984 A JP22515984 A JP 22515984A JP S61103686 A JPS61103686 A JP S61103686A
Authority
JP
Japan
Prior art keywords
melting point
high melting
silicon
point metal
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22515984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH029530B2 (enrdf_load_stackoverflow
Inventor
Kenichi Hijikata
土方　研一
Tadashi Sugihara
杉原　忠
Masashi Komabayashi
正士 駒林
Shuji Hida
修司 飛田
Toshiya Urabe
占部　俊哉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP22515984A priority Critical patent/JPS61103686A/ja
Publication of JPS61103686A publication Critical patent/JPS61103686A/ja
Publication of JPH029530B2 publication Critical patent/JPH029530B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C23C26/02—Coating not provided for in groups C23C2/00 - C23C24/00 applying molten material to the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Physical Vapour Deposition (AREA)
JP22515984A 1984-10-26 1984-10-26 高融点金属材と珪素材の接合方法 Granted JPS61103686A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22515984A JPS61103686A (ja) 1984-10-26 1984-10-26 高融点金属材と珪素材の接合方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22515984A JPS61103686A (ja) 1984-10-26 1984-10-26 高融点金属材と珪素材の接合方法

Publications (2)

Publication Number Publication Date
JPS61103686A true JPS61103686A (ja) 1986-05-22
JPH029530B2 JPH029530B2 (enrdf_load_stackoverflow) 1990-03-02

Family

ID=16824865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22515984A Granted JPS61103686A (ja) 1984-10-26 1984-10-26 高融点金属材と珪素材の接合方法

Country Status (1)

Country Link
JP (1) JPS61103686A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01255665A (ja) * 1988-04-05 1989-10-12 Toshiba Corp スパッタリングターゲット
JP2012160532A (ja) * 2011-01-31 2012-08-23 Nippon Steel Corp Ｎａ含有Ｍｏターゲット及びその製造方法
CN107497932A (zh) * 2017-06-23 2017-12-22 成都飞机工业（集团）有限责任公司 一种可切削塑料拉型模及其制造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01255665A (ja) * 1988-04-05 1989-10-12 Toshiba Corp スパッタリングターゲット
JP2012160532A (ja) * 2011-01-31 2012-08-23 Nippon Steel Corp Ｎａ含有Ｍｏターゲット及びその製造方法
CN107497932A (zh) * 2017-06-23 2017-12-22 成都飞机工业（集团）有限责任公司 一种可切削塑料拉型模及其制造方法

Also Published As

Publication number Publication date
JPH029530B2 (enrdf_load_stackoverflow) 1990-03-02

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