JPH029354Y2 - - Google Patents

Info

Publication number
JPH029354Y2
JPH029354Y2 JP1984156423U JP15642384U JPH029354Y2 JP H029354 Y2 JPH029354 Y2 JP H029354Y2 JP 1984156423 U JP1984156423 U JP 1984156423U JP 15642384 U JP15642384 U JP 15642384U JP H029354 Y2 JPH029354 Y2 JP H029354Y2
Authority
JP
Japan
Prior art keywords
organic solvent
workpiece
steam tank
boiling point
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984156423U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6171201U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984156423U priority Critical patent/JPH029354Y2/ja
Publication of JPS6171201U publication Critical patent/JPS6171201U/ja
Application granted granted Critical
Publication of JPH029354Y2 publication Critical patent/JPH029354Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Drying Of Solid Materials (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP1984156423U 1984-10-18 1984-10-18 Expired JPH029354Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984156423U JPH029354Y2 (OSRAM) 1984-10-18 1984-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984156423U JPH029354Y2 (OSRAM) 1984-10-18 1984-10-18

Publications (2)

Publication Number Publication Date
JPS6171201U JPS6171201U (OSRAM) 1986-05-15
JPH029354Y2 true JPH029354Y2 (OSRAM) 1990-03-07

Family

ID=30714427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984156423U Expired JPH029354Y2 (OSRAM) 1984-10-18 1984-10-18

Country Status (1)

Country Link
JP (1) JPH029354Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5107190B2 (ja) * 2008-09-11 2012-12-26 大日本スクリーン製造株式会社 基板乾燥装置及び濃度算出方法

Also Published As

Publication number Publication date
JPS6171201U (OSRAM) 1986-05-15

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