JPH0287368U - - Google Patents

Info

Publication number
JPH0287368U
JPH0287368U JP16854988U JP16854988U JPH0287368U JP H0287368 U JPH0287368 U JP H0287368U JP 16854988 U JP16854988 U JP 16854988U JP 16854988 U JP16854988 U JP 16854988U JP H0287368 U JPH0287368 U JP H0287368U
Authority
JP
Japan
Prior art keywords
accelerating
variable resistor
divided
tube
acceleration voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16854988U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16854988U priority Critical patent/JPH0287368U/ja
Publication of JPH0287368U publication Critical patent/JPH0287368U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第1図はこの考案の一実施例の加速管20を用
いたイオン注入装置の基本的な構成を示す概念図
、第2図は従来技術の基本的な構成を示す概念図
である。 7…加速電源、9…加速電極、20…加速管、
21…可変抵抗器。

Claims (1)

  1. 【実用新案登録請求の範囲】 イオンビームの進行方向に沿つて配列した複数
    の加速電極に、加速電源からの加速電圧を分圧し
    て印加するようにしたイオン注入装置の加速管に
    おいて、 前記複数の加速電極間に可変抵抗器を接続し、
    この可変抵抗器で前記加速電圧を分圧するように
    したことを特徴とするイオン注入装置の加速管。
JP16854988U 1988-12-26 1988-12-26 Pending JPH0287368U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16854988U JPH0287368U (ja) 1988-12-26 1988-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16854988U JPH0287368U (ja) 1988-12-26 1988-12-26

Publications (1)

Publication Number Publication Date
JPH0287368U true JPH0287368U (ja) 1990-07-11

Family

ID=31457824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16854988U Pending JPH0287368U (ja) 1988-12-26 1988-12-26

Country Status (1)

Country Link
JP (1) JPH0287368U (ja)

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