JPH028473B2 - - Google Patents

Info

Publication number
JPH028473B2
JPH028473B2 JP60154409A JP15440985A JPH028473B2 JP H028473 B2 JPH028473 B2 JP H028473B2 JP 60154409 A JP60154409 A JP 60154409A JP 15440985 A JP15440985 A JP 15440985A JP H028473 B2 JPH028473 B2 JP H028473B2
Authority
JP
Japan
Prior art keywords
reflecting mirror
ultraviolet
printed circuit
ultraviolet laser
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60154409A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214494A (ja
Inventor
Hiromi Sakamoto
Ikuo Oono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Storage Battery Co Ltd
Original Assignee
Japan Storage Battery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Storage Battery Co Ltd filed Critical Japan Storage Battery Co Ltd
Priority to JP60154409A priority Critical patent/JPS6214494A/ja
Publication of JPS6214494A publication Critical patent/JPS6214494A/ja
Publication of JPH028473B2 publication Critical patent/JPH028473B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP60154409A 1985-07-12 1985-07-12 紫外線レ−ザ−照射方法 Granted JPS6214494A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60154409A JPS6214494A (ja) 1985-07-12 1985-07-12 紫外線レ−ザ−照射方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60154409A JPS6214494A (ja) 1985-07-12 1985-07-12 紫外線レ−ザ−照射方法

Publications (2)

Publication Number Publication Date
JPS6214494A JPS6214494A (ja) 1987-01-23
JPH028473B2 true JPH028473B2 (enrdf_load_stackoverflow) 1990-02-23

Family

ID=15583517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60154409A Granted JPS6214494A (ja) 1985-07-12 1985-07-12 紫外線レ−ザ−照射方法

Country Status (1)

Country Link
JP (1) JPS6214494A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0255330A (ja) * 1988-08-22 1990-02-23 Matsushita Electric Ind Co Ltd 液晶用配向膜の製法

Also Published As

Publication number Publication date
JPS6214494A (ja) 1987-01-23

Similar Documents

Publication Publication Date Title
JP2655465B2 (ja) 反射型ホモジナイザーおよび反射型照明光学装置
US4822975A (en) Method and apparatus for scanning exposure
JPS62178904A (ja) レ−ザ光照射装置
US4841341A (en) Integrator for an exposure apparatus or the like
USRE34634E (en) Light illumination device
KR20010043419A (ko) 인코히어런트 광을 이용한 광학 마스터 제작법
JPH08286382A (ja) 半導体露光装置及びその照明方法
US7755741B2 (en) Substrate exposure apparatus and illumination apparatus
JPH028473B2 (enrdf_load_stackoverflow)
JPS6332555A (ja) 露光装置
JP3627355B2 (ja) スキャン式露光装置
JPH11260705A (ja) 露光装置
JPS6269519A (ja) 紫外線レ−ザ−照射方法
US4716442A (en) Exposure device and exposure control method
JPH04250455A (ja) 円弧照明装置
CN214278635U (zh) 曝光镜头及曝光装置
JPS58222522A (ja) プロジエクシヨンアライナ
JP2000250223A (ja) 露光装置
JP3013341B2 (ja) X線照射用光学系及びそれを用いたx線投影露光装置
JPS6381420A (ja) 照明装置
JP2788434B2 (ja) 投影露光方法及びその装置
JPS636540A (ja) インテグレ−タ
JP2501053B2 (ja) 紫外パルスレ―ザによる投影式露光方法
JPH0349213A (ja) 露光装置
JP3531245B2 (ja) 照明装置及び露光装置