JPH0282770U - - Google Patents
Info
- Publication number
- JPH0282770U JPH0282770U JP16015088U JP16015088U JPH0282770U JP H0282770 U JPH0282770 U JP H0282770U JP 16015088 U JP16015088 U JP 16015088U JP 16015088 U JP16015088 U JP 16015088U JP H0282770 U JPH0282770 U JP H0282770U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum processing
- chamber
- pressure seal
- seal section
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 1
- 238000010926 purge Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16015088U JPH0282770U (cs) | 1988-12-09 | 1988-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16015088U JPH0282770U (cs) | 1988-12-09 | 1988-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282770U true JPH0282770U (cs) | 1990-06-26 |
Family
ID=31441968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16015088U Pending JPH0282770U (cs) | 1988-12-09 | 1988-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282770U (cs) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0379987A (ja) * | 1989-08-23 | 1991-04-04 | Ulvac Japan Ltd | 差動排気形真空処理装置 |
| JP2001214275A (ja) * | 2000-01-28 | 2001-08-07 | Tdk Corp | プラズマ処理装置 |
| JP2011006737A (ja) * | 2009-06-25 | 2011-01-13 | Hitachi Zosen Corp | 真空成膜装置及び真空成膜方法 |
| JP2011042848A (ja) * | 2009-08-24 | 2011-03-03 | Fujifilm Corp | 成膜装置 |
-
1988
- 1988-12-09 JP JP16015088U patent/JPH0282770U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0379987A (ja) * | 1989-08-23 | 1991-04-04 | Ulvac Japan Ltd | 差動排気形真空処理装置 |
| JP2001214275A (ja) * | 2000-01-28 | 2001-08-07 | Tdk Corp | プラズマ処理装置 |
| JP2011006737A (ja) * | 2009-06-25 | 2011-01-13 | Hitachi Zosen Corp | 真空成膜装置及び真空成膜方法 |
| JP2011042848A (ja) * | 2009-08-24 | 2011-03-03 | Fujifilm Corp | 成膜装置 |
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