JPH0282771U - - Google Patents
Info
- Publication number
- JPH0282771U JPH0282771U JP16148588U JP16148588U JPH0282771U JP H0282771 U JPH0282771 U JP H0282771U JP 16148588 U JP16148588 U JP 16148588U JP 16148588 U JP16148588 U JP 16148588U JP H0282771 U JPH0282771 U JP H0282771U
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- passage
- chambers
- pressure difference
- belt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16148588U JPH0282771U (cs) | 1988-12-12 | 1988-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16148588U JPH0282771U (cs) | 1988-12-12 | 1988-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282771U true JPH0282771U (cs) | 1990-06-26 |
Family
ID=31444465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16148588U Pending JPH0282771U (cs) | 1988-12-12 | 1988-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282771U (cs) |
-
1988
- 1988-12-12 JP JP16148588U patent/JPH0282771U/ja active Pending
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