JPH027869Y2 - - Google Patents
Info
- Publication number
- JPH027869Y2 JPH027869Y2 JP18801685U JP18801685U JPH027869Y2 JP H027869 Y2 JPH027869 Y2 JP H027869Y2 JP 18801685 U JP18801685 U JP 18801685U JP 18801685 U JP18801685 U JP 18801685U JP H027869 Y2 JPH027869 Y2 JP H027869Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- electromagnetic coil
- capacitor
- power supply
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 239000003990 capacitor Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 238000005566 electron beam evaporation Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 7
- 238000010408 sweeping Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18801685U JPH027869Y2 (OSRAM) | 1985-12-06 | 1985-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18801685U JPH027869Y2 (OSRAM) | 1985-12-06 | 1985-12-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6297168U JPS6297168U (OSRAM) | 1987-06-20 |
| JPH027869Y2 true JPH027869Y2 (OSRAM) | 1990-02-26 |
Family
ID=31138994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18801685U Expired JPH027869Y2 (OSRAM) | 1985-12-06 | 1985-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH027869Y2 (OSRAM) |
-
1985
- 1985-12-06 JP JP18801685U patent/JPH027869Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6297168U (OSRAM) | 1987-06-20 |
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