JPH027684B2 - - Google Patents

Info

Publication number
JPH027684B2
JPH027684B2 JP61222649A JP22264986A JPH027684B2 JP H027684 B2 JPH027684 B2 JP H027684B2 JP 61222649 A JP61222649 A JP 61222649A JP 22264986 A JP22264986 A JP 22264986A JP H027684 B2 JPH027684 B2 JP H027684B2
Authority
JP
Japan
Prior art keywords
mixed acid
bubbles
foamable
pump
circulation pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61222649A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6377510A (ja
Inventor
Kazushige Komatsu
Hiroyuki Baba
Ju Oshida
Nobuo Fuje
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61222649A priority Critical patent/JPS6377510A/ja
Publication of JPS6377510A publication Critical patent/JPS6377510A/ja
Publication of JPH027684B2 publication Critical patent/JPH027684B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
  • Filtration Of Liquid (AREA)
JP61222649A 1986-09-20 1986-09-20 発泡性混酸用循環濾過装置 Granted JPS6377510A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61222649A JPS6377510A (ja) 1986-09-20 1986-09-20 発泡性混酸用循環濾過装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61222649A JPS6377510A (ja) 1986-09-20 1986-09-20 発泡性混酸用循環濾過装置

Publications (2)

Publication Number Publication Date
JPS6377510A JPS6377510A (ja) 1988-04-07
JPH027684B2 true JPH027684B2 (oth) 1990-02-20

Family

ID=16785759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61222649A Granted JPS6377510A (ja) 1986-09-20 1986-09-20 発泡性混酸用循環濾過装置

Country Status (1)

Country Link
JP (1) JPS6377510A (oth)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0790125B2 (ja) * 1988-08-26 1995-10-04 富士通株式会社 発泡性水溶液の循環濾過方法
JP3595441B2 (ja) 1997-12-29 2004-12-02 三菱電機株式会社 塩酸過水を用いた洗浄方法
KR100317714B1 (ko) * 1999-06-02 2001-12-22 황인길 약액 장치
US7416370B2 (en) 2005-06-15 2008-08-26 Lam Research Corporation Method and apparatus for transporting a substrate using non-Newtonian fluid

Also Published As

Publication number Publication date
JPS6377510A (ja) 1988-04-07

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