JPH02717U - - Google Patents
Info
- Publication number
- JPH02717U JPH02717U JP7715688U JP7715688U JPH02717U JP H02717 U JPH02717 U JP H02717U JP 7715688 U JP7715688 U JP 7715688U JP 7715688 U JP7715688 U JP 7715688U JP H02717 U JPH02717 U JP H02717U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- holding member
- exposed
- holding
- gas suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7715688U JPH0519948Y2 (cs) | 1988-06-10 | 1988-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7715688U JPH0519948Y2 (cs) | 1988-06-10 | 1988-06-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02717U true JPH02717U (cs) | 1990-01-05 |
| JPH0519948Y2 JPH0519948Y2 (cs) | 1993-05-25 |
Family
ID=31302151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7715688U Expired - Lifetime JPH0519948Y2 (cs) | 1988-06-10 | 1988-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519948Y2 (cs) |
-
1988
- 1988-06-10 JP JP7715688U patent/JPH0519948Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519948Y2 (cs) | 1993-05-25 |
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