JPH0271521A - 半導体集積回路装置の製造方法 - Google Patents

半導体集積回路装置の製造方法

Info

Publication number
JPH0271521A
JPH0271521A JP1107641A JP10764189A JPH0271521A JP H0271521 A JPH0271521 A JP H0271521A JP 1107641 A JP1107641 A JP 1107641A JP 10764189 A JP10764189 A JP 10764189A JP H0271521 A JPH0271521 A JP H0271521A
Authority
JP
Japan
Prior art keywords
film
polycrystalline silicon
substrate
insulating film
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1107641A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580156B2 (enExample
Inventor
Shinichiro Mitani
真一郎 三谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1107641A priority Critical patent/JPH0271521A/ja
Publication of JPH0271521A publication Critical patent/JPH0271521A/ja
Publication of JPH0580156B2 publication Critical patent/JPH0580156B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Semiconductor Memories (AREA)
JP1107641A 1989-04-28 1989-04-28 半導体集積回路装置の製造方法 Granted JPH0271521A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1107641A JPH0271521A (ja) 1989-04-28 1989-04-28 半導体集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1107641A JPH0271521A (ja) 1989-04-28 1989-04-28 半導体集積回路装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57075341A Division JPS58192364A (ja) 1982-05-07 1982-05-07 半導体集積回路装置

Publications (2)

Publication Number Publication Date
JPH0271521A true JPH0271521A (ja) 1990-03-12
JPH0580156B2 JPH0580156B2 (enExample) 1993-11-08

Family

ID=14464344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1107641A Granted JPH0271521A (ja) 1989-04-28 1989-04-28 半導体集積回路装置の製造方法

Country Status (1)

Country Link
JP (1) JPH0271521A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USH1630H (en) * 1995-03-01 1997-01-07 The Procter & Gamble Company Diaper having plural upstanding leg cuffs
US5735838A (en) * 1993-11-15 1998-04-07 Molnlycke Ab Disposable diaper having elasticized leg cuffs
US5824172A (en) * 1994-06-16 1998-10-20 Kimberly-Clark Worldwide, Inc. Method of making an absorbent garment comprising dual containment flaps
US6293934B1 (en) * 1997-09-30 2001-09-25 Uni-Charm Corporation Disposable absorbent article
US6659993B2 (en) * 1997-12-26 2003-12-09 Uni-Charm Corporation Disposable diaper
US8043275B2 (en) * 2001-12-19 2011-10-25 Kimberly Clark Worldwide, Inc. Absorbent garment with dual containment flaps

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694643A (en) * 1979-12-27 1981-07-31 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694643A (en) * 1979-12-27 1981-07-31 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5735838A (en) * 1993-11-15 1998-04-07 Molnlycke Ab Disposable diaper having elasticized leg cuffs
US5824172A (en) * 1994-06-16 1998-10-20 Kimberly-Clark Worldwide, Inc. Method of making an absorbent garment comprising dual containment flaps
US6110158A (en) * 1994-06-16 2000-08-29 Kimberly-Clark Worldwide, Inc. Absorbent garment comprising dual containment flaps
USH1630H (en) * 1995-03-01 1997-01-07 The Procter & Gamble Company Diaper having plural upstanding leg cuffs
US6293934B1 (en) * 1997-09-30 2001-09-25 Uni-Charm Corporation Disposable absorbent article
US6451001B2 (en) 1997-09-30 2002-09-17 Uni-Charm Corporation Disposable absorbent article
US6659993B2 (en) * 1997-12-26 2003-12-09 Uni-Charm Corporation Disposable diaper
US8043275B2 (en) * 2001-12-19 2011-10-25 Kimberly Clark Worldwide, Inc. Absorbent garment with dual containment flaps

Also Published As

Publication number Publication date
JPH0580156B2 (enExample) 1993-11-08

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