JPH0580156B2 - - Google Patents

Info

Publication number
JPH0580156B2
JPH0580156B2 JP1107641A JP10764189A JPH0580156B2 JP H0580156 B2 JPH0580156 B2 JP H0580156B2 JP 1107641 A JP1107641 A JP 1107641A JP 10764189 A JP10764189 A JP 10764189A JP H0580156 B2 JPH0580156 B2 JP H0580156B2
Authority
JP
Japan
Prior art keywords
film
region
polycrystalline silicon
substrate
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1107641A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0271521A (ja
Inventor
Shinichiro Mitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1107641A priority Critical patent/JPH0271521A/ja
Publication of JPH0271521A publication Critical patent/JPH0271521A/ja
Publication of JPH0580156B2 publication Critical patent/JPH0580156B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Semiconductor Memories (AREA)
JP1107641A 1989-04-28 1989-04-28 半導体集積回路装置の製造方法 Granted JPH0271521A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1107641A JPH0271521A (ja) 1989-04-28 1989-04-28 半導体集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1107641A JPH0271521A (ja) 1989-04-28 1989-04-28 半導体集積回路装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57075341A Division JPS58192364A (ja) 1982-05-07 1982-05-07 半導体集積回路装置

Publications (2)

Publication Number Publication Date
JPH0271521A JPH0271521A (ja) 1990-03-12
JPH0580156B2 true JPH0580156B2 (enExample) 1993-11-08

Family

ID=14464344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1107641A Granted JPH0271521A (ja) 1989-04-28 1989-04-28 半導体集積回路装置の製造方法

Country Status (1)

Country Link
JP (1) JPH0271521A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE9303746L (sv) * 1993-11-15 1995-05-16 Moelnlycke Ab Engångsblöja fördsedd med elasticerade benmanschetter
US5669896A (en) * 1994-06-16 1997-09-23 Kimberly-Clark Worldwide, Inc. Absorbent garment comprising dual containment flaps
USH1630H (en) * 1995-03-01 1997-01-07 The Procter & Gamble Company Diaper having plural upstanding leg cuffs
JP3385190B2 (ja) * 1997-09-30 2003-03-10 ユニ・チャーム株式会社 使い捨て吸収性物品
JP3434695B2 (ja) * 1997-12-26 2003-08-11 ユニ・チャーム株式会社 使い捨ておむつ
US8043275B2 (en) * 2001-12-19 2011-10-25 Kimberly Clark Worldwide, Inc. Absorbent garment with dual containment flaps

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694643A (en) * 1979-12-27 1981-07-31 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPH0271521A (ja) 1990-03-12

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