JPH0266161A - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPH0266161A
JPH0266161A JP30842687A JP30842687A JPH0266161A JP H0266161 A JPH0266161 A JP H0266161A JP 30842687 A JP30842687 A JP 30842687A JP 30842687 A JP30842687 A JP 30842687A JP H0266161 A JPH0266161 A JP H0266161A
Authority
JP
Japan
Prior art keywords
vacuum
evaporation
substrate
ejection cell
ejection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30842687A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0564712B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shintaro Hattori
服部　紳太郎
Takayuki Takahagi
隆行 高萩
Kei Ishitani
石谷　炯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Development Corp of Japan filed Critical Research Development Corp of Japan
Priority to JP30842687A priority Critical patent/JPH0266161A/ja
Priority to US07/280,152 priority patent/US5007372A/en
Priority to EP88311500A priority patent/EP0319347B1/en
Priority to DE3850941T priority patent/DE3850941T2/de
Publication of JPH0266161A publication Critical patent/JPH0266161A/ja
Publication of JPH0564712B2 publication Critical patent/JPH0564712B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP30842687A 1987-12-04 1987-12-04 真空蒸着装置 Granted JPH0266161A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP30842687A JPH0266161A (ja) 1987-12-04 1987-12-04 真空蒸着装置
US07/280,152 US5007372A (en) 1987-12-04 1988-12-05 Vacuum depositing apparatus
EP88311500A EP0319347B1 (en) 1987-12-04 1988-12-05 Vacuum depositing apparatus
DE3850941T DE3850941T2 (de) 1987-12-04 1988-12-05 Vakuumbeschichtungsanlage.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30842687A JPH0266161A (ja) 1987-12-04 1987-12-04 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH0266161A true JPH0266161A (ja) 1990-03-06
JPH0564712B2 JPH0564712B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-16

Family

ID=17980911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30842687A Granted JPH0266161A (ja) 1987-12-04 1987-12-04 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH0266161A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2403955A (en) * 2003-07-17 2005-01-19 Fuji Electric Holdings Co Organic thin film manufacturing method and apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61261322A (ja) * 1985-05-15 1986-11-19 Ulvac Corp 合成樹脂被膜の形成方法
JPS6230873A (ja) * 1985-07-31 1987-02-09 Ulvac Corp バツチ式真空蒸着装置用蒸発源収納装置
JPH01147056A (ja) * 1987-11-30 1989-06-08 Eiko Eng:Kk 真空薄膜形成装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61261322A (ja) * 1985-05-15 1986-11-19 Ulvac Corp 合成樹脂被膜の形成方法
JPS6230873A (ja) * 1985-07-31 1987-02-09 Ulvac Corp バツチ式真空蒸着装置用蒸発源収納装置
JPH01147056A (ja) * 1987-11-30 1989-06-08 Eiko Eng:Kk 真空薄膜形成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2403955A (en) * 2003-07-17 2005-01-19 Fuji Electric Holdings Co Organic thin film manufacturing method and apparatus
GB2403955B (en) * 2003-07-17 2006-05-24 Fuji Electric Holdings Co Organic thin film manufacturing method and manufacturing apparatus

Also Published As

Publication number Publication date
JPH0564712B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-16

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