JPH0265114U - - Google Patents
Info
- Publication number
- JPH0265114U JPH0265114U JP14559888U JP14559888U JPH0265114U JP H0265114 U JPH0265114 U JP H0265114U JP 14559888 U JP14559888 U JP 14559888U JP 14559888 U JP14559888 U JP 14559888U JP H0265114 U JPH0265114 U JP H0265114U
- Authority
- JP
- Japan
- Prior art keywords
- reading device
- condensing lens
- measurement scale
- optical scale
- scale
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims 6
- 238000010586 diagram Methods 0.000 description 9
Landscapes
- Optical Transform (AREA)
Description
第１図は本考案の一実施例を示す構成図、第２
図はモジユールの構成図、第３図は移動機構の構
成図、第４図は移動機構の拡大構成図、第５図は
モジユールの移動による光学系の変化を示す説明
図、第６図は本考案の他の実施例を示す構成図、
第７図は光源収納ケースの構成図、第８図、第９
図は移動機構の他の実施例を示す構成図、第１０
図、第１１図はレンズ手段の移動による光学系の
変化を示す説明図である。
１……被測定物体、２……スケール、３……レ
ーザー光源、４……集光レンズ手段、５，６……
ミラー、７……第１ハーフミラー、８……第２ハ
ーフミラー、９，１０……受光素子、１１，１２
……増幅器、１３……信号処理手段、１４……表
示手段、１６……本体筐体、１７……モジユール
、１８……移動機構。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a block diagram of the module, Figure 3 is a block diagram of the moving mechanism, Figure 4 is an enlarged block diagram of the moving mechanism, Figure 5 is an explanatory diagram showing changes in the optical system due to the movement of the module, and Figure 6 is the main body. A configuration diagram showing another embodiment of the invention,
Figure 7 is a configuration diagram of the light source storage case, Figures 8 and 9.
The figure is a block diagram showing another embodiment of the moving mechanism, No. 10.
11 are explanatory diagrams showing changes in the optical system due to movement of the lens means. 1...Object to be measured, 2...Scale, 3...Laser light source, 4...Condensing lens means, 5, 6...
Mirror, 7... First half mirror, 8... Second half mirror, 9, 10... Light receiving element, 11, 12
... amplifier, 13 ... signal processing means, 14 ... display means, 16 ... main body casing, 17 ... module, 18 ... movement mechanism.
Claims (1)
動物体に固定された測定スケールに落射させる手
段、上記測定スケール上に形成された反射形回折
格子よりの±１次反射光を夫々混合させその干渉
光を電気信号に変換処理して移動量をデイジタル
的に出力する信号処理手段を具備する光学的スケ
ール読取装置において、上記レーザー光源と集光
レンズ手段をモジユール構成とすると共に、この
モジユールの上記測定スケールに対するｚ方向距
離を調節する移動手段設けたことを特徴とする光
学的スケール読取装置。 (2) レーザー光源を集光レンズ手段を介して移
動物体に固定された測定スケールに落射させる手
段、上記測定スケール上に形成された反射形回折
格子よりの±１次反射光を夫々混合させその干渉
光を電気信号に変換処理して移動量をデイジタル
的に出力する信号処理手段を具備する光学的スケ
ール読取装置において、上記集光レンズ手段の上
記測定スケールに対するｚ方向距離を調節する移
動手段設けたことを特徴とする光学的スケール読
取装置。[Claims for Utility Model Registration] (1) Means for projecting a laser beam onto a measurement scale fixed to a moving object through a condensing lens means, ±1 order from a reflective diffraction grating formed on the measurement scale. In an optical scale reading device, the laser light source and the condensing lens means have a modular configuration in an optical scale reading device equipped with a signal processing means for mixing each reflected light, converting the interference light into an electric signal, and digitally outputting the amount of movement. An optical scale reading device further comprising a moving means for adjusting the distance of the module in the z direction with respect to the measurement scale. (2) Means for projecting a laser light source onto a measurement scale fixed to a moving object through a condensing lens means, and mixing the ±1st-order reflected light from a reflective diffraction grating formed on the measurement scale. An optical scale reading device comprising a signal processing means for converting interference light into an electric signal and digitally outputting the amount of movement, further comprising a moving means for adjusting a distance in the z direction of the condensing lens means with respect to the measurement scale. An optical scale reading device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14559888U JPH0265114U (en) | 1988-11-08 | 1988-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14559888U JPH0265114U (en) | 1988-11-08 | 1988-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0265114U true JPH0265114U (en) | 1990-05-16 |
Family
ID=31414332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14559888U Pending JPH0265114U (en) | 1988-11-08 | 1988-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0265114U (en) |
-
1988
- 1988-11-08 JP JP14559888U patent/JPH0265114U/ja active Pending
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