JPH0265115U - - Google Patents
Info
- Publication number
- JPH0265115U JPH0265115U JP14559788U JP14559788U JPH0265115U JP H0265115 U JPH0265115 U JP H0265115U JP 14559788 U JP14559788 U JP 14559788U JP 14559788 U JP14559788 U JP 14559788U JP H0265115 U JPH0265115 U JP H0265115U
- Authority
- JP
- Japan
- Prior art keywords
- light
- pair
- receiving elements
- signals
- receive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Optical Transform (AREA)
Description
第１図は本考案の一実施例を示す構成図、第２
図はその動作説明図、第３図は本考案の他の実施
例主要部の構成図、第４図は従来技術の一例を示
す構成図である。
１……被測定物体、２……スケール、３……レ
ーザー光源、４……集光レンズ手段、７……第１
ハーフミラー、８……第２ハーフミラー、９，１
０……受光素子、１１，１２……バツフア増幅器
、１３……信号処理手段、１４……表示手段、１
６……オフセツト修正手段、１７，１８……ハー
フミラー、１９，２０……受光素子、２１，２２
……増幅器。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
3 is a diagram illustrating its operation, FIG. 3 is a configuration diagram of the main parts of another embodiment of the present invention, and FIG. 4 is a configuration diagram showing an example of the prior art. DESCRIPTION OF SYMBOLS 1...Object to be measured, 2...Scale, 3...Laser light source, 4...Condensing lens means, 7...First
Half mirror, 8...Second half mirror, 9,1
0... Light receiving element, 11, 12... Buffer amplifier, 13... Signal processing means, 14... Display means, 1
6... Offset correction means, 17, 18... Half mirror, 19, 20... Light receiving element, 21, 22
……amplifier.
Claims (1)
体に固定された測定スケールに落射させる手段と
、上記測定スケール上に形成された反射形回折格
子よりの±１次反射光を夫々混合させその干渉光
を電気信号に変換する一対の受光素子と、これら
受光素子の信号を受ける一対のバツフア増幅器と
、これらバツフア増幅器出力を処理して移動量を
デイジタル的に出力する信号処理手段とを具備す
る光学的スケール読取装置において、上記±１次
反射光の一部を夫々独立に取り出して受光する一
対の受光素子と、これら受光素子の信号を受けて
オフセツト信号に変換して上記バツフア増幅器の
入力に夫々独立に供給する一対の増幅器とを具備
した光学的スケール読取装置。 Means for projecting a laser light source onto a measurement scale fixed to a moving object through a condensing lens means, and interference light obtained by mixing the ±1st-order reflected light from a reflective diffraction grating formed on the measurement scale, respectively. An optical system comprising: a pair of light-receiving elements that convert the light into electrical signals; a pair of buffer amplifiers that receive signals from these light-receiving elements; and a signal processing means that processes the outputs of these buffer amplifiers and digitally outputs the amount of movement. The scale reading device includes a pair of light receiving elements that independently take out and receive a portion of the ±1st-order reflected light, and a pair of light receiving elements that receive the signals of these light receiving elements, convert them into offset signals, and input the signals independently to the inputs of the buffer amplifier. an optical scale reading device comprising: a pair of amplifiers;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14559788U JPH0265115U (en) | 1988-11-08 | 1988-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14559788U JPH0265115U (en) | 1988-11-08 | 1988-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0265115U true JPH0265115U (en) | 1990-05-16 |
Family
ID=31414330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14559788U Pending JPH0265115U (en) | 1988-11-08 | 1988-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0265115U (en) |
-
1988
- 1988-11-08 JP JP14559788U patent/JPH0265115U/ja active Pending
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