JPS63195217U - - Google Patents
Info
- Publication number
- JPS63195217U JPS63195217U JP8657187U JP8657187U JPS63195217U JP S63195217 U JPS63195217 U JP S63195217U JP 8657187 U JP8657187 U JP 8657187U JP 8657187 U JP8657187 U JP 8657187U JP S63195217 U JPS63195217 U JP S63195217U
- Authority
- JP
- Japan
- Prior art keywords
- projecting
- moving object
- reflected light
- object moving
- onto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Description
第１図は本考案の主要部の実施例を示す構成図
、第２図、第３図はその動作説明図、第４図は従
来技術の一例を示す構成図である。
１……第１移動物体、２……第１スケール、３
……レーザ光源、４……第１集光レンズ、１５…
…第２移動物体、１６……第２スケール、１７…
…第２集光レンズ、１８……ハーフミラー、１９
……偏向板、２０……受光素子、２１……電力制
御手段。
FIG. 1 is a block diagram showing an embodiment of the main part of the present invention, FIGS. 2 and 3 are diagrams explaining its operation, and FIG. 4 is a block diagram showing an example of the prior art. 1...First moving object, 2...First scale, 3
...Laser light source, 4...First condensing lens, 15...
...Second moving object, 16...Second scale, 17...
...Second condensing lens, 18...Half mirror, 19
. . . polarization plate, 20 . . . light receiving element, 21 . . . power control means.
Claims (1)
レンズ手段を介してｘ方向に移動する第１移動物
体に固定された第１測定スケールに落射させる手
段と、上記レーザー光源の他方を第２集光レンズ
並びに９０°位相を回転させる偏向板を介してｙ
方向に移動する第２移動物体に固定された第２測
定スケールに落射させる手段と、上記第１及び第
２測定スケール上に形成された反射形回折格子よ
りの±１次反射光を夫々混合させその干渉光を電
気信号に変換処理してｘ方向及びｙ方向の移動量
をデイジタル的に出力する一対の信号処理手段よ
りなる光学的スケール読取装置。 means for projecting one of the double-end-emitting laser light sources onto a first measuring scale fixed to a first moving object moving in the x direction through a first condensing lens means; y through a condenser lens and a polarizing plate that rotates the phase by 90°.
means for projecting the reflected light onto a second measurement scale fixed to a second moving object moving in the direction; and mixing the ±1st-order reflected light from the reflection type diffraction gratings formed on the first and second measurement scales, respectively. An optical scale reading device comprising a pair of signal processing means that converts the interference light into an electrical signal and digitally outputs the amount of movement in the x and y directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8657187U JPS63195217U (en) | 1987-06-03 | 1987-06-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8657187U JPS63195217U (en) | 1987-06-03 | 1987-06-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195217U true JPS63195217U (en) | 1988-12-15 |
Family
ID=30942997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8657187U Pending JPS63195217U (en) | 1987-06-03 | 1987-06-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195217U (en) |
-
1987
- 1987-06-03 JP JP8657187U patent/JPS63195217U/ja active Pending
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