JPS5945506U - optical length measurement scale - Google Patents
optical length measurement scaleInfo
- Publication number
- JPS5945506U JPS5945506U JP14275382U JP14275382U JPS5945506U JP S5945506 U JPS5945506 U JP S5945506U JP 14275382 U JP14275382 U JP 14275382U JP 14275382 U JP14275382 U JP 14275382U JP S5945506 U JPS5945506 U JP S5945506U
- Authority
- JP
- Japan
- Prior art keywords
- light
- diffraction grating
- order
- optical length
- reflected light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
゛第１図および第２図は従来の光学式測長スケールの構
成を示す図、第３図は透過型回折格子を使った本考案に
よる光学式測長スケールの代表的な構成を示す図、第４
図から第６図までは透過型回折格子を用いる本考案の三
つの異った態様の構成を示す図、第７図は反射型回折格
子を使った本考案による光学式測長スケールの構成を示
す図、第８図から第１０図までは反射型回折格子を用い
る本考案の三つの異った態様の構成を示す図。
２１・・・光源、２２・・・レンズ、２３・・・回折格
子、２４．２５・・・平面鏡、２６．２７・・・偏光板
、２Ｂ・・・ビー１ム・スプリッタ、２９．３０・・・
偏光板、３１．３２・・・光検出器１．３３・・・１７
４波長板、３４・・・プリズム、３５・・・反射型回折
格子。゛Figures 1 and 2 are diagrams showing the configuration of a conventional optical length measurement scale, and Figure 3 is a diagram showing a typical configuration of an optical length measurement scale according to the present invention using a transmission type diffraction grating. Fourth
6 to 6 are diagrams showing the configuration of three different embodiments of the present invention using a transmission type diffraction grating, and FIG. 7 is a diagram showing the configuration of an optical length measurement scale according to the present invention using a reflection type diffraction grating. 8 to 10 are diagrams showing the configurations of three different embodiments of the present invention using a reflection type diffraction grating. 21... Light source, 22... Lens, 23... Diffraction grating, 24.25... Plane mirror, 26.27... Polarizing plate, 2B... Beam splitter, 29.30...・・・
Polarizing plate, 31.32...photodetector 1.33...17
4-wavelength plate, 34...prism, 35...reflection type diffraction grating.
Claims (5)
装置からの光ビームの上記回折格子による＋１次又は−
１次の回折光の透過光または反射光を上記回折格子に向
って折り返す反射面と、０次の透過光または反射光を上
記回折格子に向って送り返す反射面と、上記０次の透過
光または反射光および上記＋１次又は−１次の回折光の
透過光または反射光がつぎに回折格子に当る前に１回通
過するように設けられた偏光板と、上記０次の透過光ま
たは反射光が２度目に回折格子に当った時の一１次又は
＋１次の回折光の透過光または射光と上記＋１次又は−
１次の回折光の透過光または反射光が２度目に回折格子
に当ってそのまま透過または反射する光が相互に干渉す
るようにした光学系で更にこの光ビームはビーム・スプ
リッタに入射し２本に分かれたビームの一方の線上に１
八波長板と偏光板−と光検出器とを設け、他方に偏光板
と光検出器を設けることを特徴とする光学式測長スケー
ル。(1) A laser generator, a diffraction grating, and the +1st order or − order of the light beam from the laser generator by the diffraction grating.
a reflective surface that returns the transmitted light or reflected light of the first-order diffracted light toward the diffraction grating; a reflective surface that sends the zero-order transmitted light or reflected light back toward the diffraction grating; a polarizing plate provided so that the reflected light and the transmitted light or reflected light of the +1st order or -1st order diffracted light pass through once before hitting the diffraction grating; and the 0th order transmitted light or reflected light. The transmitted light or emitted light of the 11th or +1st order diffracted light when it hits the diffraction grating for the second time and the above +1st order or -
The optical system is such that the transmitted or reflected light of the first-order diffracted light hits the diffraction grating for the second time and the transmitted or reflected light interferes with each other.This light beam then enters the beam splitter and splits into two beams. 1 on one line of the beam divided into
An optical length measurement scale characterized by having an eight-wavelength plate, a polarizing plate, and a photodetector, and having a polarizing plate and a photodetector on the other side.
子に対して、上記＋１次または一１次の回折光の透過光
または反射光が上記回折格子に対して垂直となるように
傾斜して入射することを特徴とする、実用新案登録請求
の範囲第（１）項記載の光学式測長スケール。(2) The light beam from the laser generator is tilted with respect to the diffraction grating so that the transmitted light or reflected light of the +1st order or 11th order diffracted light is perpendicular to the diffraction grating. The optical length measuring scale according to claim (1) of the utility model registration, characterized in that the optical length measuring scale is incident on the optical length measuring scale.
用新案登録請求の範囲第（２）項記載の光学式測長スケ
ール。(3) The optical length measurement scale according to claim (2) of the utility model registration, wherein the reflecting surface is a plane mirror.
る、実用新案登録請求の範囲第（２）項記載の光学式測
長スケール。(4) The optical length measurement scale according to claim (2) of the utility model registration, wherein the reflective surface is a prism surface.
′格子であることを特徴とする、実用新案登録請
求の範囲第（２）項記載の光学式測長スケール。(5) Reflection type diffraction where the above reflecting surface has the same effect as a plane mirror
The optical length measuring scale according to claim (2) of the utility model registration, characterized in that it is a lattice.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14275382U JPS5945506U (en) | 1982-09-20 | 1982-09-20 | optical length measurement scale |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14275382U JPS5945506U (en) | 1982-09-20 | 1982-09-20 | optical length measurement scale |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5945506U true JPS5945506U (en) | 1984-03-26 |
Family
ID=30318861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14275382U Pending JPS5945506U (en) | 1982-09-20 | 1982-09-20 | optical length measurement scale |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5945506U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6165116A (en) * | 1984-09-05 | 1986-04-03 | Canon Inc | Rotary encoder |
| JPS62163918A (en) * | 1986-01-14 | 1987-07-20 | Canon Inc | Rotary encoder |
| JPH03148015A (en) * | 1989-11-02 | 1991-06-24 | Dr Johannes Heidenhain Gmbh | Position measuring apparatus |
| JP2005121539A (en) * | 2003-10-17 | 2005-05-12 | Sony Manufacturing Systems Corp | Displacement detection device |
-
1982
- 1982-09-20 JP JP14275382U patent/JPS5945506U/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6165116A (en) * | 1984-09-05 | 1986-04-03 | Canon Inc | Rotary encoder |
| JPS62163918A (en) * | 1986-01-14 | 1987-07-20 | Canon Inc | Rotary encoder |
| JPH03148015A (en) * | 1989-11-02 | 1991-06-24 | Dr Johannes Heidenhain Gmbh | Position measuring apparatus |
| JP2005121539A (en) * | 2003-10-17 | 2005-05-12 | Sony Manufacturing Systems Corp | Displacement detection device |
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