JPS63195216U - - Google Patents
Info
- Publication number
- JPS63195216U JPS63195216U JP8614187U JP8614187U JPS63195216U JP S63195216 U JPS63195216 U JP S63195216U JP 8614187 U JP8614187 U JP 8614187U JP 8614187 U JP8614187 U JP 8614187U JP S63195216 U JPS63195216 U JP S63195216U
- Authority
- JP
- Japan
- Prior art keywords
- projecting
- condensing lens
- diffraction grating
- measurement
- servo mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Description
第１図は本考案の主要部の実施例を示す構成図
、第２図は偏向板の回転操作部分の説明図、第３
図〜第５図はその動作説明図、第６図は偏向板の
回転操作の手順を示すフローチヤート図、第７図
は従来技術の一例を示す構成図である。
１……第１移動物体、２……第１スケール、３
……レーザー光源、４……第１集光レンズ、１５
……第２移動物体、１６……第２スケール、１７
……第２集光レンズ、１８……ハーフミラー、１
９……偏向板、２０，２２……受光素子、２１…
…電力制御手段、２３……回転制御手段、２４…
…サーボ機構。
Fig. 1 is a configuration diagram showing an embodiment of the main part of the present invention, Fig. 2 is an explanatory diagram of the rotation operation part of the deflection plate, and Fig. 3
5 to 5 are explanatory diagrams of the operation, FIG. 6 is a flowchart showing the procedure for rotating the deflection plate, and FIG. 7 is a configuration diagram showing an example of the prior art. 1...First moving object, 2...First scale, 3
... Laser light source, 4 ... First condensing lens, 15
...Second moving object, 16...Second scale, 17
...Second condensing lens, 18...Half mirror, 1
9... polarization plate, 20, 22... light receiving element, 21...
...Power control means, 23...Rotation control means, 24...
...servo mechanism.
Claims (1)
レンズ手段を介して第１方向に移動する第１移動
物体に固定された第１測定スケールに落射させる
手段と、上記レーザー光源の他方を第２集光レン
ズ並びにサーボ機構により回転操作される偏向板
を介して上記第１方向とは任意の交差角度を成す
第２方向に移動する第２物体に固定された第２測
定スケールに落射させる手段と、上記第２測定ス
ケール上に形成された反射形回折格子よりの±１
次反射光の一方を受ける受光手段と、この受光手
段の出力が最大となるように上記サーボ機構を操
作する制御手段と、上記第１及び第２測定スケー
ル上に形成された反射形回折格子よりの±１次反
射光を夫々混合させその干渉光を電気信号に変換
処理して第１方向及び第２方向の移動量をデイジ
タル的に出力する一対の信号処理手段よりなる光
学的スケール読取装置。 means for projecting one of the double-end-emitting laser light sources onto a first measurement scale fixed to a first moving object moving in a first direction through a first condensing lens means; 2. Means for projecting the reflected light onto a second measuring scale fixed to a second object moving in a second direction forming an arbitrary crossing angle with the first direction through a deflecting plate rotated by a condensing lens and a servo mechanism. and ±1 from the reflection type diffraction grating formed on the second measurement scale.
A light receiving means for receiving one of the second reflected lights, a control means for operating the servo mechanism so that the output of the light receiving means is maximized, and a reflective diffraction grating formed on the first and second measurement scales. An optical scale reading device comprising a pair of signal processing means for mixing the ±1st-order reflected lights of the above, converting the interference lights into electrical signals, and digitally outputting the amounts of movement in the first direction and the second direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8614187U JPS63195216U (en) | 1987-06-02 | 1987-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8614187U JPS63195216U (en) | 1987-06-02 | 1987-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195216U true JPS63195216U (en) | 1988-12-15 |
Family
ID=30942180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8614187U Pending JPS63195216U (en) | 1987-06-02 | 1987-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195216U (en) |
-
1987
- 1987-06-02 JP JP8614187U patent/JPS63195216U/ja active Pending
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