JPH01179216U - - Google Patents
Info
- Publication number
- JPH01179216U JPH01179216U JP7687488U JP7687488U JPH01179216U JP H01179216 U JPH01179216 U JP H01179216U JP 7687488 U JP7687488 U JP 7687488U JP 7687488 U JP7687488 U JP 7687488U JP H01179216 U JPH01179216 U JP H01179216U
- Authority
- JP
- Japan
- Prior art keywords
- laser light
- light
- measurement scale
- half mirror
- diffraction grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Optical Transform (AREA)
Description
第１図は本考案の具体的な実施例を示す構成図
、第２図は本考案の基本構成図、第３図、第４図
、第５図は各オプシヨンモジユールにおけるハー
フミラーの回転角調節に関する説明図、第６図は
偏向板の回転操作部の説明図、第７図、第８図は
その動作説明図、第９図は従来技術の一例を示す
構成図である。
１６……基本モジユール、１６１……レーザー
光源、１６２，１６３……第１、第２集光レンズ
、１６４……ハーフミラー、１６５……受光素子
、１６６……電力制御手段、１７，１８……第１
、第２オプシヨンモジユール、１７１，１８１…
…ハーフミラー、１７２，１８２……集光レンズ
、１７３，１８３……偏向板、１７４，１８４…
…移動物体、１７５，１８５……測定スケール、
１７６，１８６……受光素子、１７７，１８７…
…回転制御手段、１７８，１８８……サーボ機構
、１７′，１８′，１８″……追加オプシヨンモ
ジユール。
Fig. 1 is a block diagram showing a specific embodiment of the present invention, Fig. 2 is a basic block diagram of the present invention, and Figs. 3, 4, and 5 are rotation angles of the half mirror in each optional module. FIG. 6 is an explanatory diagram of the rotation operation section of the deflection plate, FIGS. 7 and 8 are explanatory diagrams of its operation, and FIG. 9 is a configuration diagram showing an example of the prior art. 16... Basic module, 161... Laser light source, 162, 163... First and second condensing lenses, 164... Half mirror, 165... Light receiving element, 166... Power control means, 17, 18... 1st
, second option module, 171, 181...
... Half mirror, 172, 182 ... Condensing lens, 173, 183 ... Deflection plate, 174, 184 ...
...moving object, 175,185...measuring scale,
176, 186... Light receiving element, 177, 187...
...Rotation control means, 178, 188...Servo mechanism, 17', 18', 18''...Additional option module.
Claims (1)
集光レンズ手段を介して第１オプシヨンモジユー
ルに落射させる手段、上記レーザー光源の他方を
第２集光レンズ手段を介して上記第１オプシヨン
モジユールの測定方向とは任意の交差角度を成す
第２オプシヨンモジユールに落射させる手段を有
する基本モジユールとよりなり、上記各オプシヨ
ンモジユールは上記レーザー光源の一方又は他方
を任意個数の追加オプシヨンモジユールに供給す
るためのハーフミラー手段、サーボ機構により回
転操作される偏向板を介して入射光線を移動物体
に固定された測定スケールに落射させる手段、上
記測定スケール上に形成された反射形回折格子よ
りの±１次反射光の一方を受ける受光手段、この
受光手段の出力が最大となるように上記サーボ機
構を操作する制御手段、測定スケール上に形成さ
れた反射形回折格子よりの±１次反射光を夫々混
合させその干渉光を電気信号に変換処理して移動
量をデイジタル的に出力する信号処理手段を具備
する光学的スケール読取装置。 (2) 上記オプシヨンモジユール内のハーフミラ
ー手段に角度微調整機構を設けたことを特徴とす
る請求項(1)記載の光学的スケール読取装置。[Scope of claims for utility model registration] (1) One of the dual-end emission type laser light sources is
means for directing the other laser light source to the first option module through a condensing lens means; 2, each of the optional modules is rotated by a servo mechanism and half mirror means for supplying one or the other of the laser light sources to any number of additional optional modules. means for causing the incident light beam to fall onto a measurement scale fixed to a moving object through a deflection plate that is operated; light receiving means for receiving one of the ±1st-order reflected light from a reflective diffraction grating formed on the measurement scale; A control means that operates the servo mechanism so that the output of the light receiving means is maximized, and a control means that mixes the ±1st-order reflected light from the reflective diffraction grating formed on the measurement scale and converts the interference light into an electrical signal. An optical scale reading device equipped with a signal processing means for processing and digitally outputting the amount of movement. (2) The optical scale reading device according to claim (1), wherein the half mirror means in the optional module is provided with an angle fine adjustment mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7687488U JPH01179216U (en) | 1988-06-10 | 1988-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7687488U JPH01179216U (en) | 1988-06-10 | 1988-06-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01179216U true JPH01179216U (en) | 1989-12-22 |
Family
ID=31301882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7687488U Pending JPH01179216U (en) | 1988-06-10 | 1988-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01179216U (en) |
-
1988
- 1988-06-10 JP JP7687488U patent/JPH01179216U/ja active Pending
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