JPS6355145U - - Google Patents

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Publication number
JPS6355145U
JPS6355145U JP14970286U JP14970286U JPS6355145U JP S6355145 U JPS6355145 U JP S6355145U JP 14970286 U JP14970286 U JP 14970286U JP 14970286 U JP14970286 U JP 14970286U JP S6355145 U JPS6355145 U JP S6355145U
Authority
JP
Japan
Prior art keywords
diffraction grating
measuring
light
parallelism
transmitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14970286U
Other languages
Japanese (ja)
Other versions
JPH0512753Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986149702U priority Critical patent/JPH0512753Y2/ja
Publication of JPS6355145U publication Critical patent/JPS6355145U/ja
Application granted granted Critical
Publication of JPH0512753Y2 publication Critical patent/JPH0512753Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例を示す構成ブロツク
図、第2図は被測定光の入射状態を示す図、第3
図は実験結果を示す図、第4図は実験回路を示す
図、第5図は回折格子の模様を示す図、第6図は
回折格子の形状例を示す図、第7図、第8図は他
の実施例を示す構成ブロツク図、第9図は第8図
に示す回路の出力特性を示す図、第10図、第1
1図は本考案の他の実施例を示す構成図、第12
図は従来装置の構成例を示す図、第13図はその
一部拡大図である。 1…半導体レーザ、2…コリメータレンズ、3
,4…スクリーン、11,12,31,32,4
1…回折格子、13,24,25,33,43…
光検出器、14,26,27…アンプ、15…電
圧測定器、21…ハーフミラー、28…差動アン
プ、42…ミラー。
Fig. 1 is a configuration block diagram showing an embodiment of the present invention, Fig. 2 is a diagram showing the incident state of the light to be measured, and Fig. 3 is a diagram showing the incident state of the light to be measured.
The figure shows the experimental results, Figure 4 shows the experimental circuit, Figure 5 shows the pattern of the diffraction grating, Figure 6 shows an example of the shape of the diffraction grating, Figures 7 and 8. 9 is a configuration block diagram showing another embodiment, FIG. 9 is a diagram showing the output characteristics of the circuit shown in FIG. 8, FIG.
Figure 1 is a configuration diagram showing another embodiment of the present invention;
The figure shows an example of the configuration of a conventional device, and FIG. 13 is a partially enlarged view thereof. 1... Semiconductor laser, 2... Collimator lens, 3
, 4...Screen, 11, 12, 31, 32, 4
1... Diffraction grating, 13, 24, 25, 33, 43...
Photodetector, 14, 26, 27... Amplifier, 15... Voltage measuring device, 21... Half mirror, 28... Differential amplifier, 42... Mirror.

Claims (1)

【実用新案登録請求の範囲】 (1) 入射光に対してその透過光景が最大又は最
小になるように配置された回折格子と、該回折格
子の透過光を測定する光検出器とを具備し、前記
回折格子の透過光景を測定することにより入射光
の平行度を測定するようにしたことを特徴とする
光ビームの平行度測定装置。 (2) 前記回折格子として反射型回折格子を用い
たことを特徴とする実用新案登録請求の範囲第1
項記載の光ビームの平行度測定装置。
[Claims for Utility Model Registration] (1) Comprising a diffraction grating arranged so that the transmitted light is maximized or minimized with respect to incident light, and a photodetector for measuring the transmitted light of the diffraction grating. . A light beam parallelism measuring device, characterized in that the parallelism of incident light is measured by measuring the transmitted view of the diffraction grating. (2) Utility model registration claim 1 characterized in that a reflective diffraction grating is used as the diffraction grating.
A device for measuring parallelism of a light beam as described in Section 1.
JP1986149702U 1986-09-30 1986-09-30 Expired - Lifetime JPH0512753Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986149702U JPH0512753Y2 (en) 1986-09-30 1986-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986149702U JPH0512753Y2 (en) 1986-09-30 1986-09-30

Publications (2)

Publication Number Publication Date
JPS6355145U true JPS6355145U (en) 1988-04-13
JPH0512753Y2 JPH0512753Y2 (en) 1993-04-02

Family

ID=31065162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986149702U Expired - Lifetime JPH0512753Y2 (en) 1986-09-30 1986-09-30

Country Status (1)

Country Link
JP (1) JPH0512753Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288144U (en) * 1988-12-23 1990-07-12

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5983116A (en) * 1982-11-02 1984-05-14 Olympus Optical Co Ltd Adjustment device for optical system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5983116A (en) * 1982-11-02 1984-05-14 Olympus Optical Co Ltd Adjustment device for optical system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288144U (en) * 1988-12-23 1990-07-12

Also Published As

Publication number Publication date
JPH0512753Y2 (en) 1993-04-02

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