JPH0328404U - - Google Patents
Info
- Publication number
- JPH0328404U JPH0328404U JP8876489U JP8876489U JPH0328404U JP H0328404 U JPH0328404 U JP H0328404U JP 8876489 U JP8876489 U JP 8876489U JP 8876489 U JP8876489 U JP 8876489U JP H0328404 U JPH0328404 U JP H0328404U
- Authority
- JP
- Japan
- Prior art keywords
- dimensional position
- light source
- half mirror
- laser light
- position sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
Description
第１図は本考案に係わる真直度測定装置の一実
施例を示す構成図、第２図は可動台が△ｘ移動し
た時の２次元位置センサの出力を示す図、第３図
は空気の屈折率分布の違い等によりレーザ光が屈
曲した時の２次元位置センサの出力を示す図、第
４図は従来例である。
２１……固定台、２２，２６……レーザ光源、
２３，２７……ハーフミラー、２４，２８……２
次元位置センサ、２５……可動台。
Fig. 1 is a configuration diagram showing an embodiment of the straightness measuring device according to the present invention, Fig. 2 is a diagram showing the output of the two-dimensional position sensor when the movable table moves by △x, and Fig. 3 is a diagram showing the output of the two-dimensional position sensor when the movable table moves by FIG. 4, a diagram showing the output of a two-dimensional position sensor when a laser beam is bent due to a difference in refractive index distribution, etc., is a conventional example. 21... Fixed stand, 22, 26... Laser light source,
23, 27...Half mirror, 24, 28...2
Dimensional position sensor, 25... movable platform.
Claims (1)
に設置された第１のレーザ光源と第１のハーフミ
ラーと第１の２次元位置センサと、前記レール上
を移動可能とされた可動台と、この可動台上に設
置された第２のレーザ光源と第２のハーフミラー
と第２の２次元位置センサを備え、前記第１のレ
ーザ光源からの出射光を前記第２のハーフミラー
を介して前記第２の２次元位置センサで受光する
と同時に、前記第２のレーザ光源からの出射光の
前記第１のハーフミラーを介して前記第１の２次
元位置センサで受光する事により、前記可動台が
前記レール上を移動した時の前記２つの２次元位
置センサの出力から前記可動台の真直度を測定す
る様な構成とした事を特徴とする真直度測定装置
。 A fixed base fixed on a rail, a first laser light source, a first half mirror, and a first two-dimensional position sensor installed on the fixed base, and a movable base movable on the rail. and a second laser light source, a second half mirror, and a second two-dimensional position sensor installed on the movable table, and the light emitted from the first laser light source is directed to the second half mirror. At the same time, the light emitted from the second laser light source is received by the first two-dimensional position sensor through the first half mirror. A straightness measuring device characterized in that the straightness of the movable base is measured from the outputs of the two two-dimensional position sensors when the movable base moves on the rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8876489U JPH0328404U (en) | 1989-07-28 | 1989-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8876489U JPH0328404U (en) | 1989-07-28 | 1989-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0328404U true JPH0328404U (en) | 1991-03-20 |
Family
ID=31638357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8876489U Pending JPH0328404U (en) | 1989-07-28 | 1989-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0328404U (en) |
-
1989
- 1989-07-28 JP JP8876489U patent/JPH0328404U/ja active Pending
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