JPH03110304U - - Google Patents
Info
- Publication number
- JPH03110304U JPH03110304U JP2036990U JP2036990U JPH03110304U JP H03110304 U JPH03110304 U JP H03110304U JP 2036990 U JP2036990 U JP 2036990U JP 2036990 U JP2036990 U JP 2036990U JP H03110304 U JPH03110304 U JP H03110304U
- Authority
- JP
- Japan
- Prior art keywords
- light
- transparent object
- half mirror
- detection head
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案の透明物体厚さ測定装置の具体
的な構成を示す図、第２図は第１図の説明に供す
る図である。
Ａ１，Ａ２，Ａ３……上部検出ヘツド、Ｂ１，
Ｂ２，Ｂ３……下部検出ヘツド、Ｃ……シート状
物体、１０……光源、２０……ピンホール、３１
……凹面鏡、３４……光検出器、３５……メクラ
板、５０……ハーフミラー。
FIG. 1 is a diagram showing a specific configuration of the transparent object thickness measuring device of the present invention, and FIG. 2 is a diagram for explaining FIG. 1. A 1 , A 2 , A 3 ... Upper detection head, B 1 ,
B 2 , B 3 ... lower detection head, C ... sheet-like object, 10 ... light source, 20 ... pinhole, 31
... Concave mirror, 34 ... Photodetector, 35 ... Blind plate, 50 ... Half mirror.
Claims (1)
置される上部検出ヘツド及び下部検出ヘツドを用
いて前記透明物体の厚さを測定する装置において
、前記上部検出ヘツドは、光源の光を平行光とす
る手段、前記平行光とされた光束を測定光と参照
光に分割するハーフミラー、前記参照光を反射す
る凹面鏡、該凹面鏡の反射光を前記ハーフミラー
を通過した後に受けて平行光として２次元の光検
出器に投光する一対の凸レンズ、及び前記ハーフ
ミラー下部で前記測定光のみが通過する位置に設
置されたメクラ板を有して成り、前記下部検出ヘ
ツドは前記測定光が前記透明物体を通過して入射
する光の光路を１８０°方向を変えて再び前記透
明物体を介して前記ハーフミラー乃至光検出器に
出射するコーナーキユーブが配置されて成ること
を特徴とする透明物体厚さ測定装置。 In an apparatus for measuring the thickness of a transparent object to be measured using an upper detection head and a lower detection head arranged above and below a moving path of the transparent object, the upper detection head converts light from a light source into parallel light. a half mirror that splits the parallel light beam into a measurement light and a reference light; a concave mirror that reflects the reference light; and a means for receiving the reflected light of the concave mirror after passing through the half mirror and converting it into two-dimensional parallel light. a pair of convex lenses that project light onto a photodetector; and a blind plate installed at a position below the half mirror through which only the measurement light passes; A transparent object characterized in that a corner cube is arranged to change the optical path of the incident light by 180 degrees and emit the light to the half mirror or the photodetector via the transparent object again. measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2036990U JPH0729445Y2 (en) | 1990-02-28 | 1990-02-28 | Transparent object thickness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2036990U JPH0729445Y2 (en) | 1990-02-28 | 1990-02-28 | Transparent object thickness measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03110304U true JPH03110304U (en) | 1991-11-12 |
| JPH0729445Y2 JPH0729445Y2 (en) | 1995-07-05 |
Family
ID=31523459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2036990U Expired - Lifetime JPH0729445Y2 (en) | 1990-02-28 | 1990-02-28 | Transparent object thickness measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729445Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011022204A (en) * | 2009-07-13 | 2011-02-03 | Nikon Corp | Off-axis holographic microscope |
-
1990
- 1990-02-28 JP JP2036990U patent/JPH0729445Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011022204A (en) * | 2009-07-13 | 2011-02-03 | Nikon Corp | Off-axis holographic microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729445Y2 (en) | 1995-07-05 |
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