JPS6253349U

JPS6253349U -

Info

Publication number: JPS6253349U
Application number: JP14513085U
Authority: JP
Priority date: 1985-09-25
Filing date: 1985-09-25
Publication date: 1987-04-02

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例全体構成図、第２図
は第１図の異物による反射作用を示す図、第３図
は第１図の作動ブロツク図、第４図、第５図は第
１図の作動時の出力電圧と走査方向を示すグラフ
、第６図は従来装置の全体構成図、第７図、第８
図は第６図の作動時の出力電圧と走査方向を示す
グラフである。２０……第１光学系、２１，３１……レーザー
光源、２２，３２……振動ミラー、２３……被計
測物、２４，３３……走査レンズ、２５……集光
レンズ、２６，３６……受光素子、２７……信号
処理部、３４……異物。 Fig. 1 is an overall configuration diagram of an embodiment of the present invention, Fig. 2 is a diagram showing the reflection action by a foreign object shown in Fig. 1, Fig. 3 is an operation block diagram of Fig. 1, and Figs. 4 and 5 are Figure 1 is a graph showing the output voltage and scanning direction during operation, Figure 6 is an overall configuration diagram of the conventional device, Figures 7 and 8.
The figure is a graph showing the output voltage and scanning direction during the operation of FIG. 6. 20... First optical system, 21, 31... Laser light source, 22, 32... Vibrating mirror, 23... Measured object, 24, 33... Scanning lens, 25... Condensing lens, 26, 36... . . . Light receiving element, 27 . . . Signal processing section, 34 . . . Foreign matter.

Claims

[Scope of utility model registration request]

A first optical system includes a light projecting section that irradiates the surface of the object to be measured with laser light from obliquely above, a light receiving section that receives the reflected light from the surface of the object to be measured, and a first optical system that is horizontal to the surface of the object to be measured. A surface defect detection device using a laser beam, comprising a light projecting section that irradiates light from a direction, and a second optical system that transmits reflected light from foreign matter attached to the surface of the object to be measured to a light receiving section using an optical fiber.