JPH01144808U - - Google Patents
Info
- Publication number
- JPH01144808U JPH01144808U JP4031888U JP4031888U JPH01144808U JP H01144808 U JPH01144808 U JP H01144808U JP 4031888 U JP4031888 U JP 4031888U JP 4031888 U JP4031888 U JP 4031888U JP H01144808 U JPH01144808 U JP H01144808U
- Authority
- JP
- Japan
- Prior art keywords
- light
- displacement
- laser beam
- measurement object
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
- Measurement Of Optical Distance (AREA)
Description
第１図は本考案の一実施例を示す摸式的斜視図
、第２図は同実施例においてガラス面とＡｕ面と
を連続して測定した結果を示すグラフ、第３図は
同実施例における測定点付近の測定面を示す平面
図で、光検出素子の像を示した図、第４図は従来
の変位測定装置の構成を示す摸式的斜視図、第５
図は同従来例の装置におけるＡｕ面及びガラス面
の変位測定方法を示す斜視図、第６図は第５図の
測定によつて得られた変位測定の結果を示すグラ
フである。
３……測定対象、５……光検出素子、１１……
反射率が低い領域としてのガラス面、１２……反
射率が高い領域としてのＡｕ蒸着面（Ａｕ面）、
３０……結像点としてのスポツト、５０……変位
測定装置、５１……アポデイゼーシヨンフイルタ
（フイルタ）。
Fig. 1 is a schematic perspective view showing an embodiment of the present invention, Fig. 2 is a graph showing the results of continuous measurement of the glass surface and Au surface in the same embodiment, and Fig. 3 is the same embodiment. FIG. 4 is a plan view showing a measurement surface near a measurement point in which an image of a photodetecting element is shown; FIG.
The figure is a perspective view showing a method for measuring displacement of the Au surface and the glass surface in the conventional device, and FIG. 6 is a graph showing the displacement measurement results obtained by the measurement of FIG. 5. 3...Measurement object, 5...Photodetection element, 11...
Glass surface as a region with low reflectance, 12... Au vapor deposition surface (Au surface) as a region with high reflectance,
30...Spot as an imaging point, 50...Displacement measuring device, 51...Apodization filter (filter).
Claims (1)
乱光を光検出素子の受光面上に結像させ、前記測
定対象の表面の変位を、前記受光面における結像
点の移動に対応した光検出素子の出力電気信号と
して測定する変位測定装置において、照射したレ
ーザ光が含む不要周辺光を減衰させるためのフイ
ルタを装置の投光側に設け、反射率が低い領域を
測定する際に反射率が高い領域から不要周辺光が
光検出素子に入射しないように構成したことを特
徴とする変位測定装置。 The reflected and scattered light of the laser beam irradiated onto the surface of the measurement object is imaged on the light-receiving surface of a photodetecting element, and the displacement of the surface of the measurement object is detected by photodetection corresponding to the movement of the image-forming point on the light-reception surface. In a displacement measuring device that measures the output electrical signal of an element, a filter is installed on the light emitting side of the device to attenuate unnecessary ambient light contained in the irradiated laser beam, and when measuring an area with low reflectance, A displacement measuring device characterized in that it is configured to prevent unnecessary peripheral light from entering a photodetecting element from a high area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988040318U JPH0725618Y2 (en) | 1988-03-29 | 1988-03-29 | Displacement measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988040318U JPH0725618Y2 (en) | 1988-03-29 | 1988-03-29 | Displacement measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01144808U true JPH01144808U (en) | 1989-10-04 |
| JPH0725618Y2 JPH0725618Y2 (en) | 1995-06-07 |
Family
ID=31266789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988040318U Expired - Lifetime JPH0725618Y2 (en) | 1988-03-29 | 1988-03-29 | Displacement measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0725618Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011106896A (en) * | 2009-11-16 | 2011-06-02 | Mitsutoyo Corp | Non-contact probe and measuring machine |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5276944A (en) * | 1975-12-23 | 1977-06-28 | Canon Inc | Optical filter |
| JPS6184509U (en) * | 1984-11-06 | 1986-06-04 |
-
1988
- 1988-03-29 JP JP1988040318U patent/JPH0725618Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5276944A (en) * | 1975-12-23 | 1977-06-28 | Canon Inc | Optical filter |
| JPS6184509U (en) * | 1984-11-06 | 1986-06-04 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011106896A (en) * | 2009-11-16 | 2011-06-02 | Mitsutoyo Corp | Non-contact probe and measuring machine |
| US8704154B2 (en) | 2009-11-16 | 2014-04-22 | Mitutoyo Corporation | Non-contact probe with an optical filter and measuring machine including the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0725618Y2 (en) | 1995-06-07 |