JPH0291908U - - Google Patents
Info
- Publication number
- JPH0291908U JPH0291908U JP17039988U JP17039988U JPH0291908U JP H0291908 U JPH0291908 U JP H0291908U JP 17039988 U JP17039988 U JP 17039988U JP 17039988 U JP17039988 U JP 17039988U JP H0291908 U JPH0291908 U JP H0291908U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- light
- light beam
- reflected
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案に係る表面形状測定装置の実施
例を示す断面図、第２図は同実施例におけるフー
コープリズム及び受光素子を示す平面図、第３図
は第２図の−線に沿う略示断面図、第４図は
同実施例の検出器を示す回路図、第５図は同実施
例の受光素子の出力信号を示す線図、第６図は従
来の表面形状測定装置を示す断面図である。
１０……光ビーム、１１……光軸、１２……光
源、１４……被測定物、１４Ａ……被測定表面、
１６……対物レンズ、１８……フーコープリズム
、２０，２２，２４，２６……受光素子、２８…
…検出器。
Fig. 1 is a cross-sectional view showing an embodiment of the surface profile measuring device according to the present invention, Fig. 2 is a plan view showing a Foucault prism and a light receiving element in the same embodiment, and Fig. 3 is taken along the - line in Fig. 2. A schematic cross-sectional view, FIG. 4 is a circuit diagram showing the detector of the same embodiment, FIG. 5 is a line diagram showing the output signal of the light receiving element of the same embodiment, and FIG. 6 is a conventional surface shape measuring device. FIG. 10... Light beam, 11... Optical axis, 12... Light source, 14... Measured object, 14A... Measured surface,
16... Objective lens, 18... Foucault prism, 20, 22, 24, 26... Light receiving element, 28...
…Detector.
Claims (1)
表面に対向して配置され、該被測定表面と略直交
する前記光ビームの光路上に光軸を備えた対物レ
ンズと；この対物レンズに対して前記被測定物の
反対側に配置され、前記光ビームが前記光路を通
つて前記被測定表面に直進し、且つ、該被測定表
面で反射されて形成され、前記対物レンズを通つ
た反射光を集光させる３角錐以上の多角錐形のフ
ーコープリズムと；前記反射光がこのフーコープ
リズムにより集光される３個以上の光スポツトの
位置に配置された３個以上の受光素子と；これら
受光素子上の前記反射光の光スポツト位置変化に
基づく出力信号の変化により、前記被測定表面の
前記光軸方向の変位量及び被測定表面の傾きを検
出する検出器と；を有してなる表面形状測定装置
。 a light source that emits a light beam; an objective lens that is disposed opposite to a surface to be measured of an object to be measured and has an optical axis on an optical path of the light beam that is substantially orthogonal to the surface to be measured; the light beam is arranged on the opposite side of the object to be measured, the light beam travels straight through the optical path to the surface to be measured, is reflected by the surface to be measured, and is formed by reflection passing through the objective lens. a Foucault prism in the shape of a triangular pyramid or more to condense light; three or more light-receiving elements disposed at the positions of three or more light spots on which the reflected light is condensed by the Foucault prism; a detector that detects the amount of displacement of the surface to be measured in the optical axis direction and the inclination of the surface to be measured by a change in an output signal based on a change in the position of the light spot of the reflected light on the light receiving element; Surface profile measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17039988U JPH0291908U (en) | 1988-12-29 | 1988-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17039988U JPH0291908U (en) | 1988-12-29 | 1988-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0291908U true JPH0291908U (en) | 1990-07-20 |
Family
ID=31461305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17039988U Pending JPH0291908U (en) | 1988-12-29 | 1988-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0291908U (en) |
-
1988
- 1988-12-29 JP JP17039988U patent/JPH0291908U/ja active Pending
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