JPH02126111U - - Google Patents
Info
- Publication number
- JPH02126111U JPH02126111U JP3454189U JP3454189U JPH02126111U JP H02126111 U JPH02126111 U JP H02126111U JP 3454189 U JP3454189 U JP 3454189U JP 3454189 U JP3454189 U JP 3454189U JP H02126111 U JPH02126111 U JP H02126111U
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- light receiving
- light beam
- optical path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Microscoopes, Condenser (AREA)
Description
第１図は本考案に係る顕微鏡のオートフオーカ
ス装置の実施例を示す断面図、第２図は同実施例
におけるフーコープリズム、受光素子及び検出器
を示す一部回路図を含む平面図、第３図は従来の
オートフオーカス装置を示す断面図である。
１０……光ビーム、１２……光源、１４……被
測定物、１４Ａ……被測定表面、１６Ａ〜１６Ｄ
……対物レンズ、１８……フーコープリズム、２
１〜２４……受光素子、２６……検出器、２７…
…レボルバー、２８……モード選択装置。
FIG. 1 is a sectional view showing an embodiment of an autofocus device for a microscope according to the present invention, FIG. 2 is a plan view including a partial circuit diagram showing a Foucault prism, a light receiving element, and a detector in the same embodiment, FIG. 3 is a sectional view showing a conventional autofocus device. 10...Light beam, 12...Light source, 14...Object to be measured, 14A...Surface to be measured, 16A to 16D
...Objective lens, 18...Foucault prism, 2
1 to 24... Light receiving element, 26... Detector, 27...
...Revolver, 28...Mode selection device.
Claims (1)
表面に対向して配置され、該被測定表面と略直交
する前記光ビームの光路上に選択的に配置され得
る複数の対物レンズと；該光ビーム光路上の対物
レンズに対して前記被測定物の反対側に配置され
、前記光ビームが前記光路を通つて前記被測定表
面に直進し、且つ、該被測定表面で反射されて形
成され、前記対物レンズを通つた反射光を複数個
所に集光させる多角錐形のフーコープリズムと；
このフーコープリズムの多角形面の各辺に対向し
た位置に配置され、且つ、該位置は前記複数の異
なる対物レンズを介して反射光が集光される複数
の光スポツトの位置に対応して、前記各辺毎に異
なるものとされた複数の受光素子と；これら受光
素子上の前記反射光の光スポツト位置変化に基づ
く出力信号の変化により、合焦点を検出する検出
器と；前記複数の対物レンズを選択する手段に連
動され、選択された１の対物レンズに対応する受
光素子を、前記複数の受光素子から選択して該受
光素子の出力信号を検出器に送るモード選択装置
と；を有してなる顕微鏡のオートフオーカス装置
。 a light source that emits a light beam; a plurality of objective lenses that are disposed opposite to a surface to be measured of an object to be measured and that can be selectively disposed on an optical path of the light beam substantially orthogonal to the surface to be measured; The light beam is disposed on the opposite side of the object to be measured with respect to the objective lens on the optical path of the light beam, and the light beam is formed by traveling straight to the surface to be measured through the optical path and being reflected by the surface to be measured. , a polygonal pyramid-shaped Foucault prism that focuses reflected light passing through the objective lens at a plurality of locations;
are arranged at positions opposite to each side of the polygonal surface of the Foucault prism, and the positions correspond to the positions of a plurality of light spots on which reflected light is focused through the plurality of different objective lenses, a plurality of light receiving elements that are different for each side; a detector that detects a focused point by a change in an output signal based on a change in the position of a light spot of the reflected light on these light receiving elements; and a plurality of objective objects. a mode selection device that is interlocked with the lens selection means, selects a light receiving element corresponding to the selected one objective lens from the plurality of light receiving elements, and sends an output signal of the light receiving element to a detector; An autofocus device for a microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3454189U JPH089697Y2 (en) | 1989-03-27 | 1989-03-27 | Microscope autofocus equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3454189U JPH089697Y2 (en) | 1989-03-27 | 1989-03-27 | Microscope autofocus equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02126111U true JPH02126111U (en) | 1990-10-17 |
| JPH089697Y2 JPH089697Y2 (en) | 1996-03-21 |
Family
ID=31539102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3454189U Expired - Fee Related JPH089697Y2 (en) | 1989-03-27 | 1989-03-27 | Microscope autofocus equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH089697Y2 (en) |
-
1989
- 1989-03-27 JP JP3454189U patent/JPH089697Y2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH089697Y2 (en) | 1996-03-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |