JPH02110814U - - Google Patents
Info
- Publication number
- JPH02110814U JPH02110814U JP1970089U JP1970089U JPH02110814U JP H02110814 U JPH02110814 U JP H02110814U JP 1970089 U JP1970089 U JP 1970089U JP 1970089 U JP1970089 U JP 1970089U JP H02110814 U JPH02110814 U JP H02110814U
- Authority
- JP
- Japan
- Prior art keywords
- light
- displacement measuring
- output
- photodiode
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measurement Of Optical Distance (AREA)
Description
第１図は本考案に係わる光学式変位測定器の一
実施例を示す構成図、第２図はその動作波形図、
第３図は本発明の他の実施例の動作波形図、第４
図は従来例を示す図、第５図はフオトダイオード
上での反射率むらを示す図である。
１０…レーザダイオード、１１…コリメータレ
ンズ、１２…偏光ビームスプリツタ、１３…λ／
４板、１４…対物レンズ、１５…被測定物、１７
…ビームスプリツタ、１８…集光レンズ、１９…
ピンホール、２０…ＰＺＴ、２２…フオトダイオ
ード、２４…自動利得制御回路。
FIG. 1 is a configuration diagram showing an embodiment of the optical displacement measuring device according to the present invention, and FIG. 2 is an operating waveform diagram thereof.
FIG. 3 is an operation waveform diagram of another embodiment of the present invention, and FIG.
The figure shows a conventional example, and FIG. 5 shows reflectance unevenness on a photodiode. 10...Laser diode, 11...Collimator lens, 12...Polarizing beam splitter, 13...λ/
4 plates, 14...Objective lens, 15...Object to be measured, 17
...Beam splitter, 18...Condensing lens, 19...
Pinhole, 20...PZT, 22...Photodiode, 24...Automatic gain control circuit.
Claims (1)
定物上に光スポツトを集光しその反射光の光強度
パターンを光検出器で測定し演算処理する事によ
り被測定物の微小変位を測定する光学式変位測定
器において、 被測定物からの反射光を２方向に分岐するビー
ムスプリツタと、このビームスプリツタにより分
岐された一方の光を集光する集光レンズと、集光
レンズを通過した光の焦点位置に設置されたピン
ホールと、ピンホールを共振点で振動させる為の
振動装置と、ピンホールを通過した光が入射され
るフオトダイオードとを設けた構成とし、前記振
動装置からの振動出力と前記フオトダイオードか
らの出力を乗算する事によりフオーカスエラー信
号を得る様にした事を特徴とする光学式変位測定
器。 (2) 前記振動装置からの振動出力と前記フオト
ダイオードからの出力を同期整流する事によりフ
オーカスエラー信号を得るようにした事を特徴と
する実用新案登録請求の範囲第１項記載の光学式
変位測定器。 (3) 前記ビームスプリツタにより分岐された他
方の光から得られる信号が入力される自動利得制
御回路からの出力信号により前記フオーカスエラ
ー信号を補正する様にした事を特徴とする実用新
案登録請求の範囲第１項記載の光学式変位測定器
。[Scope of Claim for Utility Model Registration] (1) The objective lens is driven in the focus direction to focus a light spot on the object to be measured, and the light intensity pattern of the reflected light is measured with a photodetector and subjected to calculation processing. In an optical displacement measuring instrument that measures minute displacements of an object to be measured, there is a beam splitter that splits the reflected light from the object into two directions, and a condenser that focuses one of the lights split by the beam splitter. A lens, a pinhole installed at the focal point of the light that has passed through the condensing lens, a vibration device to vibrate the pinhole at a resonance point, and a photodiode into which the light that has passed through the pinhole is incident are provided. 1. An optical displacement measuring device characterized in that the optical displacement measuring device has a configuration in which a focus error signal is obtained by multiplying the vibration output from the vibration device and the output from the photodiode. (2) The optical system according to claim 1, wherein a focus error signal is obtained by synchronously rectifying the vibration output from the vibration device and the output from the photodiode. Displacement measuring device. (3) Registration of a utility model characterized in that the focus error signal is corrected by an output signal from an automatic gain control circuit into which a signal obtained from the other light branched by the beam splitter is input. An optical displacement measuring instrument according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1970089U JPH02110814U (en) | 1989-02-22 | 1989-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1970089U JPH02110814U (en) | 1989-02-22 | 1989-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02110814U true JPH02110814U (en) | 1990-09-05 |
Family
ID=31235442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1970089U Pending JPH02110814U (en) | 1989-02-22 | 1989-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02110814U (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS506359A (en) * | 1973-05-14 | 1975-01-23 | ||
| JPS5111463A (en) * | 1974-07-18 | 1976-01-29 | Matsushita Electric Ind Co Ltd | ICHIKENSHUTSUSOCHI |
| JPS52107855A (en) * | 1976-03-05 | 1977-09-09 | Koito Mfg Co Ltd | Noncontact type position detector |
| JPS58120111A (en) * | 1982-01-13 | 1983-07-16 | Hitachi Denshi Ltd | Binary coding device for analog image signal |
| JPS61240113A (en) * | 1985-04-17 | 1986-10-25 | Canon Inc | Range finding device |
-
1989
- 1989-02-22 JP JP1970089U patent/JPH02110814U/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS506359A (en) * | 1973-05-14 | 1975-01-23 | ||
| JPS5111463A (en) * | 1974-07-18 | 1976-01-29 | Matsushita Electric Ind Co Ltd | ICHIKENSHUTSUSOCHI |
| JPS52107855A (en) * | 1976-03-05 | 1977-09-09 | Koito Mfg Co Ltd | Noncontact type position detector |
| JPS58120111A (en) * | 1982-01-13 | 1983-07-16 | Hitachi Denshi Ltd | Binary coding device for analog image signal |
| JPS61240113A (en) * | 1985-04-17 | 1986-10-25 | Canon Inc | Range finding device |
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