JPH0263304B2 - - Google Patents

Info

Publication number
JPH0263304B2
JPH0263304B2 JP57177518A JP17751882A JPH0263304B2 JP H0263304 B2 JPH0263304 B2 JP H0263304B2 JP 57177518 A JP57177518 A JP 57177518A JP 17751882 A JP17751882 A JP 17751882A JP H0263304 B2 JPH0263304 B2 JP H0263304B2
Authority
JP
Japan
Prior art keywords
peeling force
force
wafer
voltage
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57177518A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5967629A (ja
Inventor
Shoichi Tanimoto
Yukio Kakizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP57177518A priority Critical patent/JPS5967629A/ja
Publication of JPS5967629A publication Critical patent/JPS5967629A/ja
Publication of JPH0263304B2 publication Critical patent/JPH0263304B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Jigs For Machine Tools (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP57177518A 1982-10-12 1982-10-12 静電吸着装置 Granted JPS5967629A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57177518A JPS5967629A (ja) 1982-10-12 1982-10-12 静電吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57177518A JPS5967629A (ja) 1982-10-12 1982-10-12 静電吸着装置

Publications (2)

Publication Number Publication Date
JPS5967629A JPS5967629A (ja) 1984-04-17
JPH0263304B2 true JPH0263304B2 (cg-RX-API-DMAC10.html) 1990-12-27

Family

ID=16032310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57177518A Granted JPS5967629A (ja) 1982-10-12 1982-10-12 静電吸着装置

Country Status (1)

Country Link
JP (1) JPS5967629A (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014107382A (ja) * 2012-11-27 2014-06-09 Fuji Electric Co Ltd 半導体基板の脱離方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01227454A (ja) * 1988-03-08 1989-09-11 Nippon Telegr & Teleph Corp <Ntt> 静電チャック
JP2507155B2 (ja) * 1990-08-03 1996-06-12 松下電器産業株式会社 半導体製造装置及びその製造方法
JP2574066B2 (ja) * 1990-12-10 1997-01-22 富士通株式会社 静電吸着装置
JP2576294B2 (ja) * 1991-02-04 1997-01-29 富士通株式会社 静電チャックのウエーハ吸着・離脱方法
JP3384506B2 (ja) * 1993-03-30 2003-03-10 ソニー株式会社 半導体基板の製造方法
US5350428A (en) * 1993-06-17 1994-09-27 Vlsi Technology, Inc. Electrostatic apparatus and method for removing particles from semiconductor wafers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014107382A (ja) * 2012-11-27 2014-06-09 Fuji Electric Co Ltd 半導体基板の脱離方法

Also Published As

Publication number Publication date
JPS5967629A (ja) 1984-04-17

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