JPH0262038B2 - - Google Patents

Info

Publication number
JPH0262038B2
JPH0262038B2 JP10952184A JP10952184A JPH0262038B2 JP H0262038 B2 JPH0262038 B2 JP H0262038B2 JP 10952184 A JP10952184 A JP 10952184A JP 10952184 A JP10952184 A JP 10952184A JP H0262038 B2 JPH0262038 B2 JP H0262038B2
Authority
JP
Japan
Prior art keywords
rotating shaft
stirrer
microwave
hollow rotating
incinerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10952184A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60253899A (ja
Inventor
Sukihiko Sugimura
Mitsuhiko Nomi
Toyoji Mizushima
Shuichi Ueno
Junichi Yamaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP10952184A priority Critical patent/JPS60253899A/ja
Publication of JPS60253899A publication Critical patent/JPS60253899A/ja
Publication of JPH0262038B2 publication Critical patent/JPH0262038B2/ja
Granted legal-status Critical Current

Links

JP10952184A 1984-05-31 1984-05-31 マイクロ波焼却炉 Granted JPS60253899A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10952184A JPS60253899A (ja) 1984-05-31 1984-05-31 マイクロ波焼却炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10952184A JPS60253899A (ja) 1984-05-31 1984-05-31 マイクロ波焼却炉

Publications (2)

Publication Number Publication Date
JPS60253899A JPS60253899A (ja) 1985-12-14
JPH0262038B2 true JPH0262038B2 (enrdf_load_stackoverflow) 1990-12-21

Family

ID=14512362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10952184A Granted JPS60253899A (ja) 1984-05-31 1984-05-31 マイクロ波焼却炉

Country Status (1)

Country Link
JP (1) JPS60253899A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7049244B2 (en) 1992-06-15 2006-05-23 Micron Technology, Inc. Method for enhancing silicon dioxide to silicon nitride selectivity

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3583595D1 (de) * 1984-12-25 1991-08-29 Ebara Corp Verfahren und vorrichtung zur behandlung von abfallmaterial.
JPH01126597A (ja) * 1987-11-12 1989-05-18 New Japan Radio Co Ltd マイクロ波加熱装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7049244B2 (en) 1992-06-15 2006-05-23 Micron Technology, Inc. Method for enhancing silicon dioxide to silicon nitride selectivity

Also Published As

Publication number Publication date
JPS60253899A (ja) 1985-12-14

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