JPH026051Y2 - - Google Patents
Info
- Publication number
- JPH026051Y2 JPH026051Y2 JP20053485U JP20053485U JPH026051Y2 JP H026051 Y2 JPH026051 Y2 JP H026051Y2 JP 20053485 U JP20053485 U JP 20053485U JP 20053485 U JP20053485 U JP 20053485U JP H026051 Y2 JPH026051 Y2 JP H026051Y2
- Authority
- JP
- Japan
- Prior art keywords
- article
- entrance
- goods
- air
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007789 sealing Methods 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 239000003566 sealing material Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 238000011109 contamination Methods 0.000 description 5
- 238000012856 packing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 208000034809 Product contamination Diseases 0.000 description 1
- 238000004887 air purification Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Landscapes
- Types And Forms Of Lifts (AREA)
- Cage And Drive Apparatuses For Elevators (AREA)
- Elevator Door Apparatuses (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20053485U JPH026051Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-26 | 1985-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20053485U JPH026051Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-26 | 1985-12-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62108384U JPS62108384U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-10 |
| JPH026051Y2 true JPH026051Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-02-14 |
Family
ID=31163129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20053485U Expired JPH026051Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-26 | 1985-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH026051Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2591792B2 (ja) * | 1988-05-26 | 1997-03-19 | 株式会社日立製作所 | 清浄作業台 |
| JP5419334B2 (ja) * | 2007-07-23 | 2014-02-19 | キヤノン株式会社 | 生化学反応装置 |
| JP5789121B2 (ja) * | 2011-04-27 | 2015-10-07 | 大塚製薬株式会社 | 昇降アイソレータ装置 |
-
1985
- 1985-12-26 JP JP20053485U patent/JPH026051Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62108384U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-10 |