JPH0258588B2 - - Google Patents

Info

Publication number
JPH0258588B2
JPH0258588B2 JP10623484A JP10623484A JPH0258588B2 JP H0258588 B2 JPH0258588 B2 JP H0258588B2 JP 10623484 A JP10623484 A JP 10623484A JP 10623484 A JP10623484 A JP 10623484A JP H0258588 B2 JPH0258588 B2 JP H0258588B2
Authority
JP
Japan
Prior art keywords
screw
image signal
autocorrelation
thread
chatter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10623484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60250235A (ja
Inventor
Kazuyuki Sakurada
Yutaka Funyu
Koichiro Myagi
Junkichi Kino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Anritsu Corp
Original Assignee
Anritsu Corp
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp, Kawasaki Steel Corp filed Critical Anritsu Corp
Priority to JP10623484A priority Critical patent/JPS60250235A/ja
Publication of JPS60250235A publication Critical patent/JPS60250235A/ja
Publication of JPH0258588B2 publication Critical patent/JPH0258588B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP10623484A 1984-05-25 1984-05-25 ねじ表面の検査方法及び検査装置 Granted JPS60250235A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10623484A JPS60250235A (ja) 1984-05-25 1984-05-25 ねじ表面の検査方法及び検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10623484A JPS60250235A (ja) 1984-05-25 1984-05-25 ねじ表面の検査方法及び検査装置

Publications (2)

Publication Number Publication Date
JPS60250235A JPS60250235A (ja) 1985-12-10
JPH0258588B2 true JPH0258588B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-10

Family

ID=14428429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10623484A Granted JPS60250235A (ja) 1984-05-25 1984-05-25 ねじ表面の検査方法及び検査装置

Country Status (1)

Country Link
JP (1) JPS60250235A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62279931A (ja) * 1986-05-29 1987-12-04 レンゴ−株式会社 片面段ボ−ルの不良検出装置
US7382935B2 (en) 2003-11-07 2008-06-03 Avago Technologies Ecbu Ip Pte Ltd Homogeneous and plain surface detection in optical navigation systems
DE102007017747B4 (de) * 2007-04-12 2009-05-07 V & M Deutschland Gmbh Verfahren und Vorrichtung zur optischen Vermessung von Außengewinden
JP5036644B2 (ja) * 2008-07-03 2012-09-26 住友重機械工業株式会社 表面検査方法、及びびびりマーク検査装置
BR112012018564B1 (pt) * 2010-01-29 2019-07-02 Nippon Steel & Sumitomo Metal Corporation Aparelho de inspeção de defeitos
JP7146092B2 (ja) * 2019-07-25 2022-10-03 三菱電機株式会社 検査装置及び方法、並びにプログラム及び記録媒体

Also Published As

Publication number Publication date
JPS60250235A (ja) 1985-12-10

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