JPH0258349B2 - - Google Patents
Info
- Publication number
- JPH0258349B2 JPH0258349B2 JP28685185A JP28685185A JPH0258349B2 JP H0258349 B2 JPH0258349 B2 JP H0258349B2 JP 28685185 A JP28685185 A JP 28685185A JP 28685185 A JP28685185 A JP 28685185A JP H0258349 B2 JPH0258349 B2 JP H0258349B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- pump
- magnetron
- vacuum
- article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000576 coating method Methods 0.000 claims description 48
- 239000007789 gas Substances 0.000 claims description 35
- 239000011248 coating agent Substances 0.000 claims description 32
- 239000011261 inert gas Substances 0.000 claims description 23
- 238000002347 injection Methods 0.000 claims description 18
- 239000007924 injection Substances 0.000 claims description 18
- 238000005086 pumping Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 12
- 238000004140 cleaning Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims 1
- 210000002381 plasma Anatomy 0.000 description 30
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 26
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 21
- 229910052719 titanium Inorganic materials 0.000 description 21
- 239000010936 titanium Substances 0.000 description 21
- 229910052786 argon Inorganic materials 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 10
- 239000003921 oil Substances 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000010422 painting Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000003213 activating effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012806 monitoring device Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012552 review Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU843821699A SU1414878A1 (ru) | 1984-12-20 | 1984-12-20 | Способ ионно-плазменного напылени и устройство дл его осуществлени |
| SU3821699 | 1984-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61157677A JPS61157677A (ja) | 1986-07-17 |
| JPH0258349B2 true JPH0258349B2 (fr) | 1990-12-07 |
Family
ID=21150242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28685185A Granted JPS61157677A (ja) | 1984-12-20 | 1985-12-19 | イオン化プラズマ式の塗装方法及び装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS61157677A (fr) |
| DE (1) | DE3529813A1 (fr) |
| FR (1) | FR2575186B1 (fr) |
| SU (1) | SU1414878A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3908316A1 (de) * | 1989-03-14 | 1990-09-20 | Vladimir Aleksandrovic Sagun | Vorrichtung zum auftragen von duennschichtigen ueberzuegen auf substrate im vakuum |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3793179A (en) * | 1971-07-19 | 1974-02-19 | L Sablev | Apparatus for metal evaporation coating |
| US4049533A (en) * | 1975-09-10 | 1977-09-20 | Golyanov Vyacheslav Mikhailovi | Device for producing coatings by means of ion sputtering |
| DD145283A1 (de) * | 1979-08-06 | 1980-12-03 | Helmut Bollinger | Verfahren zur herstellung von verschleissfesten und korrosionsbestaendigen schichten |
| JPS58221271A (ja) * | 1982-06-18 | 1983-12-22 | Citizen Watch Co Ltd | イオンプレ−テイング法による被膜形成方法 |
-
1984
- 1984-12-20 SU SU843821699A patent/SU1414878A1/ru active
-
1985
- 1985-08-19 FR FR8512505A patent/FR2575186B1/fr not_active Expired
- 1985-08-20 DE DE19853529813 patent/DE3529813A1/de active Granted
- 1985-12-19 JP JP28685185A patent/JPS61157677A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2575186B1 (fr) | 1989-12-15 |
| DE3529813A1 (de) | 1986-07-03 |
| FR2575186A1 (fr) | 1986-06-27 |
| DE3529813C2 (fr) | 1987-08-27 |
| JPS61157677A (ja) | 1986-07-17 |
| SU1414878A1 (ru) | 1988-08-07 |
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